Deposition of a-C:H films from argon/cyclohexane plasma on polymer substrates

Diamond and Related Materials

Volumn 5, Issue 3-5, 1996, Pages 429-432

  Fedoseev, D V ^a   Tolmachev, Yu N ^a   Varshavskaya, I G ^a   Bukhovets, V L ^a  

^a RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

Author keywords

a C:H film; Low temperature plasma

Indexed keywords

EID: 0042091871     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-9635(95)00405-x     Document Type: Article

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