Nucleation during deposition of hydrocarbon ions as a function of substrate temperature

Diamond and Related Materials

Volumn 4, Issue 4, 1995, Pages 333-336

  Sattel, S ^a   Weiler, M ^a   Gerber, J ^a   Giessen, T ^a   Roth, H ^a   Scheib, M ^a   Jung, K ^a   Ehrhardt, H ^a   Robertson, J ^b  

^a UNIVERSITY OF KAISERSLAUTERN   (Germany)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Diamond nucleation; Diamond like films; Ion beam growth; Structural characterization

Indexed keywords

EID: 33751369717     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-9635(94)05306-5     Document Type: Article

References (20)

1. Nucleation mechanisms of diamond in plasma chemical vapor deposition
2. Characterization of bias-enhanced nucleation of diamond on silicon by invacuo surface analysis and transmission electron microscopy