Thermal donor formation in silicon enhanced by high-energy helium irradiation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 253, Issue 1-2, 2006, Pages 187-191

  Hazdra, P ^a   Komarnitskyy, V ^a  

^a CZECH TECHNICAL UNIVERSITY IN PRAGUE   (Czech Republic)

Author keywords

Alphas; Irradiation; Lifetime control; Silicon; Thermal donors

Indexed keywords

ANNEALING; HELIUM; IONS; IRRADIATION; RADIATION DAMAGE;

ANNEALING TEMPERATURE; DAMAGE-VACANCIES; LIFETIME CONTROL; THERMAL DONORS (TD);

SEMICONDUCTING SILICON;

EID: 33751322782     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.10.038     Document Type: Article

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