In situ infrared absorption spectroscopy for thin film growth by atomic layer deposition

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6325, Issue , 2006, Pages

  Wang, Yu ^a   Dai, Min ^a   Rivillon, Sandrine ^a   Ho, Ming Tsung ^a   Chabal, Yves J ^a  

^a RUTGERS UNIVERSITY   (United States)

Author keywords

Atomic Layer Deposition; FTIR spectroscopy; Gate oxides; High dielectrics; Insitu IR spectroscopy

Indexed keywords

ATOMIC LAYER DEPOSITION; GATE OXIDES; HIGH-Κ DIELECTRICS; MECHANISTIC INFORMATION;

ABSORPTION SPECTROSCOPY; DIELECTRIC MATERIALS; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INFRARED SPECTROSCOPY; SILICON;

THIN FILMS;

EID: 33751109528     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.681331     Document Type: Conference Paper

References (16)

1. C.-H. Choi, K.-Y. Nam, Z. Yu, and R. W. Dutton, IEEE Trans. Electron Devices 48, 2823, (2001).
2. G. D. Wilk, R. M. Wallace, and J. M. Anthony, J. Appl. Phys. 89, 5243 (2001).
3. S. Stemmer, J. Vac. Sci. Technol. B 22, 791 (2004).
4. D. Hausmann, J. Becker, S. Wang, and R. G. Gordon, Science 298, 402 (2002).
5. S.-W. Kand and S.-W. Rhee, J. Vac. Sci. Technol. A 22, 2392, (2004).
6. M. J. Kelly, J. H. Han, C. B. Musgrave, and G. N. Parsons, Chem. Mater. 17, 5305 (2005).
7. W. Kern and D. Puotinen, RCA Rev. 31, 187 (1970).
8. M. A. Hines, Annu. Rev. Phys. Chem. 54, 29 (2003).
9. G. S. Higashi, R. S. Becker, Y. J. Chabal, and A. J. Becker, Appl. Phys. Lett. 58, 1656 (1991).
10. V. Cosnier, M. Olivier, G. Théret, and B. André. J. Vac. Sci. Technol. A 19, 267 (2001).
11. X. Zhao and D. Vanderbilt, Phys. Rev. B 65, 233106 (2002).
12. J. W. Keister, J. Vac. Sci & Tech A 17, 1250 (1999).
13. N. Layadi, J Appl Phys. 81, 6738 (1997).
14. D. Humbird, J. Chem. Phys. 120, 2405 (2004).
15. S. Rivillon, Y. J. Chabal, L. J. Webb, D. J. Michalak, N. S. Lewis, M. D. Halls, K. Raghavachari, J. Vac. Sci. & Tech. A 23, 1100 (2005).
16. R. T. Brewer, M.-T. Ho, K. Z. Zhang, L. V. Goncharova, D. G. Starodub, T. Gustafsson, and Y. J. Chabal, Appl. Phys. Lett. 85, 1 (2004).