Determination of the deposition rate of DC magnetron sputtering in fabrication of X-ray supermirrors

Chinese Optics Letters

Volumn 4, Issue 9, 2006, Pages 550-552

  Wang, Fengli ^a   Wang, Zhanshan ^a   Zhu, Jingtao ^a   Zhang, Zhong ^a   Wu, Wenjuan ^a   Zhang, Shumin ^a   Chen, Lingyan ^a  

^a TONGJI UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; MAGNETRON SPUTTERING; MULTILAYERS; OPTICAL PROPERTIES; SUBSTRATES; X RAYS;

DEPOSITION RATE; DIRECT CURRENT (DC) MAGNETRON SPUTTERING; X RAY SUPERMIRROR;

MIRRORS;

EID: 33750913392     PISSN: 16717694     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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