Novel measurement system of the friction coefficients for the drie sidewalls

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 210-213

  Hwang, Il Han ^a   Lee, Jong Hyun ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FRICTION METERS; LIGHT; NONLINEAR SYSTEMS; SILICON;

BEAM SPRINGS; DRIE SIDEWALLS; SILICON SIDEWALLS;

MICROELECTROMECHANICAL DEVICES;

EID: 33750105021     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. T. Akiyama, D. Collard, and H. Fujita, "Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS," J.MEMS, vol. 6, no. 1, pp. 10-17, 1997.
2. N. Tas, J. Wissink, L. Sander, T. Lammerink, and M. Elwenspoek, "Modeling, design and testing of the electrostatic shuffle motor," Sens. &Actua. A, vol. 70, pp. 171-179, 1998.
3. R. Yeh, S. Hollar, and K. S. J. Pister, "Single mask, large force, and large displacement electrostatic linear inchworm motors," J.MEMS, vol. 11, no. 4, pp. 330-336, 2002.
4. M. G. Lim, J. C. Chang, D. P. Schultz, R. T. Howe, and R. M. White, "Polysilicon microstructures to characterize static friction," Proc. IEEE MEMS, pp. 85-88, 1990.
5. K. Geng, W. H. Ko, and G. M. Michal, "A preliminary study on friction measurements in MEMS," Proc. IEEE MEMS, pp. 213-216, 1991.
6. K. Noguchi, H. Fujita, and M. Suzuki, "The measurement of friction on micromechatronics elements," Proc. IEEE MEMS, pp. 148-153, 1991.
7. S. Sundararajan and B. Bhushan, "Static friction and surface roughness studies of surface micromachined electrostatic micromotors using an atomic force/friction force microscope," J. Vac. Sci. Technol. A, vol. 19, pp. 1777-1785, 2001.
8. R. Prasad, N. MacDonald, and D. Taylor, "Micro-instrumentation for tribological measurement," Transducers'95, pp. 52-55, 1995.
9. N. R. Tas, C. Gui, and M. Elwenspoek, "Static friction in elastic adhesive MEMS contacts, models and experiment," Proc. IEEE MEMS, pp. 193-198, 2000.
10. R. I. Pratt, G. C. Johnson, R. T. Howe, and J. C. Chang, "Micromechanical structures for thin film characterization," Proc. IEEE MEMS, pp. 205-208, 1991.
11. J. H. Lee, W. I. Jang, C. S. Lee, Y. I Lee, C. A. Choi, J. T. Baek, and H. J. Yoo, "Characterization of anhydrous HF gas-phase etching with CH3OH for sacrificial oxide removal," Sens. &Actu. A, vol. 64, pp. 27-32 1998.
12. I. -H. Hwang, E. -S. Yoon, and J. -H. Lee, "A nano-resolution reaction-force actuator (RFA) using MEMS technology," Proc. KMEMS, pp. 11-14, 2005.