SCOPUS 정보 검색 플랫폼

Volumn 253, Issue 1 SPEC. ISS., 2006, Pages 65-69

Optical characterization of ns-SiN:H in the infrared by spectroscopic ellipsometry

Author keywords

Lorentz oscillator; Plasma enhanced chemical vapour deposition (PECVD); Spectroscopic ellipsometry

Indexed keywords

ABSORPTION SPECTROSCOPY; ELLIPSOMETRY; LIGHT ABSORPTION; OPTICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

ABSORPTION BANDS; LORENTZ OSCILLATORS; SPECTROSCOPIC ELLIPSOMETRY;

THIN FILMS;

EID: 33750510062 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2006.05.072 Document Type: Article

Times cited : (3)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.