FTIR phase-modulated ellipsometry characterization of hydrogenated amorphous silicon nitride thin films with embedded nanoparticles

Thin Solid Films

Volumn 455-456, Issue , 2004, Pages 167-171

  Canillas, A ^a   Pinyol, A ^a   Sancho Parramon, J ^a   Ferre Borrull J ^a   Bertran, E ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Ellipsometry; Infrared spectroscopy; Nanostructured silicon nitride; Optical properties

Indexed keywords

AMORPHOUS MATERIALS; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGENATION; OPTICAL PROPERTIES; SILICON NITRIDE; THIN FILMS;

CRYSTALLINITY; NANOSTRUCTURED SILICON NITRIDE; SAED;

NANOSTRUCTURED MATERIALS;

EID: 17144472312     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.11.204     Document Type: Conference Paper

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