Optical models for the ellipsometric characterization of carbon nitride layers prepared by inverse pulsed laser deposition

Applied Surface Science

Volumn 253, Issue 1 SPEC. ISS., 2006, Pages 173-176

  Petrik, P ^a   Lohner, T ^a   Egerhazi L ^b   Geretovszky, Zs ^b  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b UNIVERSITY OF SZEGED   (Hungary)

Author keywords

Carbon nitride; Inverse pulsed laser deposition; Spectroscopic ellipsometry; Tauc Lorentz model

Indexed keywords

ELLIPSOMETRY; EXCIMER LASERS; LASER ABLATION; MATHEMATICAL MODELS; OPTICAL PROPERTIES; PULSED LASER DEPOSITION;

INVERSE PULSED LASER DEPOSITION; SPECTROSCOPIC ELLIPSOMETRY; TAUC-LORENTZ MODEL;

CARBON NITRIDE;

EID: 33750494128     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.05.102     Document Type: Article

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