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Volumn 79, Issue 4-6, 2004, Pages 1207-1209

A novel PLD configuration for deposition of films of improved quality: A case study of carbon nitride

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; FILM GROWTH; GRAPHITE; LASER PRODUCED PLASMAS; PRESSURE EFFECTS; PULSED LASER DEPOSITION; ULTRAHIGH VACUUM;

EID: 4344563263     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-004-2719-6     Document Type: Conference Paper
Times cited : (8)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.