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Volumn 79, Issue 4-6, 2004, Pages 1207-1209
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A novel PLD configuration for deposition of films of improved quality: A case study of carbon nitride
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Author keywords
[No Author keywords available]
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Indexed keywords
EXCIMER LASERS;
FILM GROWTH;
GRAPHITE;
LASER PRODUCED PLASMAS;
PRESSURE EFFECTS;
PULSED LASER DEPOSITION;
ULTRAHIGH VACUUM;
GROWTH RATES;
INVERSE PULSED LASER DEPOSITION (IPLD);
KNUDSEN LAYERS;
CARBON NITRIDE;
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EID: 4344563263
PISSN: 09478396
EISSN: None
Source Type: Journal
DOI: 10.1007/s00339-004-2719-6 Document Type: Conference Paper |
Times cited : (8)
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References (12)
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