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Volumn 79, Issue 4-6, 2004, Pages 1207-1209

A novel PLD configuration for deposition of films of improved quality: A case study of carbon nitride

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; FILM GROWTH; GRAPHITE; LASER PRODUCED PLASMAS; PRESSURE EFFECTS; PULSED LASER DEPOSITION; ULTRAHIGH VACUUM;

GROWTH RATES; INVERSE PULSED LASER DEPOSITION (IPLD); KNUDSEN LAYERS;

CARBON NITRIDE;

EID: 4344563263 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-004-2719-6 Document Type: Conference Paper

Times cited : (8)

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