Modeling flexural plate wave devices

Journal of Microelectromechanical Systems

Volumn 9, Issue 3, 2000, Pages 370-379

  Weinberg, Marc S ^a   Cunningham, Brian T ^a   Clapp, Christopher W ^a,b  

^a CHARLES STARK DRAPER LABORATORY   (United States)

^b NORTHEASTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; ALUMINUM COMPOUNDS; BOUNDARY CONDITIONS; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; EIGENVALUES AND EIGENFUNCTIONS; ELECTRIC POTENTIAL; FINITE ELEMENT METHOD; PIEZOELECTRIC DEVICES; PLATES (STRUCTURAL COMPONENTS);

ACOUSTIC CHEMICAL SENSORS; FLEXURAL PLATE WAVE (FPW) DEVICES; RESONATING BEAMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034271498     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.870063     Document Type: Article

References (15)

1. S. Wenzel, "Applications of ultrasonic lamb waves," Ph.D. dissertation, Elect. Eng. Comput. Sci. Dept., Univ. of California at Berkeley, Berkeley, CA, 1992.
2. D. Ballantine and R. M. White et al., Acoustic Wave Sensors. New York: Academic, 1997.
3. J. M. Black and R. M. White, "Microfluidic applications of flexural plate wave sensors," in Transducers'99 Conf., Sendai, Japan.
4. A. H. Meng, A. W. Wang, and R. M. White, "Ultrasonic sample concentration for microfluidic systems," in Transducers'99 Conf., Sendai, Japan.
5. C. S. Lee, K. No, and D. M. Wee, "A novel angular rate sensor employing flexural plate wave," in IEEE Int. Ultrason. Symp. Dig., vol. 1, October 17-20, 1999, pp. 493-496.
6. I. Viktorov, Rayleigh and Lamb Waves, Physical Theory and Applications. New York: Plenum, 1967.
7. M. Vellekoop, G. Lubking, P. Sarro, and A. Venema, "A multi-purpose smart acoustic Lamb wave sensor system," in Transducers'93, Yokohama, Japan, pp. 175-180.
8. S. Martin, M. Butler, J. Spates, W. Schubert, and M. Mitchell, "Magnetically excited flexural plate wave resonator," in IEEE Int. Freq. Contr. Symp. Dig., 1997, pp. 25-31.
9. C. Smith, A. J. Gilchrist, and D. N. Wormley, "Multiple and continuous span elevated guideway-vehicle dynamic performance," J. Dynam. Syst., Meas., Contr., pp. 30-40, Mar. 1975.
10. F. Hildebrand, Advanced Calculus for Applications. Englewood Cliffs, NJ: Prentice-Hall, 1962.
11. M. Weinberg, "Working equations for piezoelectric actuators and sensors," J. Microelectromech. Syst., vol. 8, pp. 529-533, Dec. 1999.
12. J. Blevins, Formulas for Natural Frequency and Mode Shape. Melbourne, FL: Krieger, 1979.
13. P. Hsieh, R. Reif, and B. Cunningham, "DC magnetron reactive sputtering of low stress aluminum nitride piezoelectric thin films for MEMS applications," in Proc. Mater. Res. Soc. Fall Meeting, Boston, MA, Nov. 1998.
14. R. J. Roark and W. Young, Formulas for Stress and Strain, 5th ed. New York: McGraw-Hill, 1975.
15. S. Crandall and N. Dahl, An Introduction to the Mechanics of Solids. New York: McGraw-Hill Book Co., 1959.