Kinetic simulation of an extreme ultraviolet radiation driven plasma near a multilayer mirror

Journal of Applied Physics

Volumn 100, Issue 7, 2006, Pages

  Van Der Velden, M H L ^a   Brok, W J M ^a   Van Der Mullen, J J A M ^a   Banine, V ^b  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b ASML   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

KINETIC SIMULATION; MULTILAYER MIRRORS; PLASMA SHEATH REGION;

COMPUTER SIMULATION; IONIZATION; LITHOGRAPHY; MIRRORS; MULTILAYERS; SILICON WAFERS;

ULTRAVIOLET RADIATION;

EID: 33750018950     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2356085     Document Type: Article

References (22)

1. C. W. Gwyn, R. Stulen, D. Sweeney, and D. Attwood, J. Vac. Sci. Technol. B 16, 3142 (1998).
2. V. Banine, J. Benschop, M. Leenders, and R. Moors, Proc. SPIE 3997, 126 (2000).
3. T. Ito and S. Okazaki, Nature (London) 406, 1027 (2000).
4. E. R. Kieft, J. J. A. M. van der Mullen, G. M. W. Kroesen, and V. Banine, Phys. Rev. E 68, 056403 (2003).
5. C. K. Birdsall and A. B. Langdon, Plasma Physics via Computer Simulation (Hilger, London, 1991).
6. R. W. Hockney and J. W. Eastwood, Computer Simulation Using Particles (Hilger, London, 1988).
7. E. Kawamura, C. K. Birdsall, and V. Vahedi, Plasma Sources Sci. Technol. 9, 413 (2000).
8. C. K. Birdsall, IEEE Trans. Plasma Sci. 19, 65 (1991).
9. V. Vahedi and M. Surendra, Comput. Phys. Commun. 87, 179 (1995).
10. M. H. L. van der Velden, W. J. M. Brok, W. J. Goedheer, V. Banine, and J. J. A. M. van der Mullen, Phys. Rev. E 73, 036406 (2005).
11. H. Gnaser, Low-Energy Irradiation of Solid Surfaces (Springer, Berlin, 1999).
12. C. K. Birdsall and D. Fuss, J. Comput. Phys. 3, 494 (1969).
13. H. R. Skullerud, Br. J. Appl. Phys. 1, 1567 (1968).
14. A. V. Phelps and Z. L. Petrovic, Plasma Sources Sci. Technol. 8, R21 (1999).
15. S. Bajt, J. B. Alameda, T. W. Barbee, Jr., W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, Opt. Eng. (Bellingham) 41, 1797 (2002).
16. S. Braun, H. Mai, M. Moss, R. Scholz, and A. Leson, Jpn. J. Appl. Phys., Part 1 41, 4074 (2002).
17. B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993).
18. S. L. Carter and H. P. Kelly, J. Phys. B 9, L565 (1976).
19. B. L. Henke, J. A. Smith, and D. T. Attwood, J. Appl. Phys. 48, 1852 (1977).
20. Y. Yamamura and H. Tawara, At. Data Nucl. Data Tables 62, 149 (1996).
21. J. Bohdansky, J. Roth, and H. L. Bay, J. Appl. Phys. 51, 2861 (1980).
22. J. Bohdansky, Nucl. Instrum. Methods Phys. Res. B 2, 587 (1984).