Comparison of three finite element models for analysis of MEMS micromirrors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5577, Issue PART 2, 2004, Pages 849-860

  Shapoorabadi, R Jafari ^a   Kirk, A G ^a  

^a MCGILL UNIVERSITY   (Canada)

Author keywords

Analytical solutions; ANSYS; Finite element modeling; Static analysis

Indexed keywords

CAPACITANCE; ELECTROSTATICS; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; TRANSDUCERS;

ANALYTICAL SOLUTIONS; ANSYS; FINITE ELEMENT MODELING; STATIC ANALYSIS;

MIRRORS;

EID: 21944454648     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.567568     Document Type: Conference Paper

References (12)

1. W.A. Moussa, H. Ahmed, W. Badawy, and M. Moussa "Investigating the Reliability of Electrostatic Comb-Drive Actuators Utilized in Microfluidic and Space Systems using Finite Element Analysis," Canadian Journal on Electrical and Computer Engineering, Vol. 27, No. 4, pp 195-200, 2002.
2. J. Wen, X. D. Hoa, A. G. Kirk, and D. A. Lowther, "Analysis of the Performance of a MEMS Micromirror" IEEE Trans. On Magnetics, Vol. 40, No. 2, pp. 1410-1413, 2004
3. M. Gyimesi, I. Avdeev, D. Ostergaard, "Finite-element simulation of micro-electromechanical systems (MEMS) by strongly coupled electromechanical transducers," IEEE Transactions on Magnetics, Vol. 40, No. 2, pp 557-560, 2004.
4. ANSIS, ANSYS Release 8.0 Documentation, Coupled-Field Analysis Guide, Canonsburg, Pennsylvania, USA, 2003.
5. H. Zhili, B. Wingfield, M. Whitley, J. Brooks, J.A. Hammer, "A design methodology for a bulk-micromachined two-dimensional electrostatic torsion micromirror" Journal of Microelectromechanical Systems, Volume: 12, Issue: 5, pp. 692-701, 2003.
6. S. Kweon, H. Lee, and H. Shin, "Modeling and Dynamic Simulation for Electrostatically Driven Micromirror" Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems MSM 2001, South Carolina, U.S.A., March 19-21, pp. 334-337, 2001.
7. th International conference on Noise and Vibration Engineering, Leuven Belgium, September 9-12, 2002
8. M. Gyimesi and D. Ostergaard "Electro-Mechanical Transducer for MEMS Analysis in ANSYS", Technical Proceedings 1999 International Conference on Modeling and Simulation of Microsystems MSM 99, San Juan, Puerto Rico, USA, pp270-273, April 19-21, 1999.
9. M. Schlegel, F. Bennini, J. Mehner, G. Herrmann, D. Müller, W. Dötzel, "Analyzing and Simulation of MEMS in VHDL-AMS Based on Reduced Order FE-Models", the Second IEEE International Conference on Sensors.
10. H. Toshiyoshi and H. Fujita, "Electrostatic Micro Torsion Mirrors for an Optical Switch Matrix", Journal of Microelectromechanical Systems, vol. 5, pp. 231-237, 1996.
11. O. Degani, E. Socher, A. Lipson, T. Leitner, D. J. Setter, S. Kaldor, and Y. Nemirovsky, "Pull-In Study of an Electrostatic Torsion Microactuator", Journal of Microelectromechanical Systems, vol. 7, pp. 373-379, 1998.
12. J. I. Young and A.M. Shkel, "Comparative Study of 2-DOF Micromirrors for Precision Light Manipulation" Proceedings of SPIE: SPIE Smart Structures and Materials Conference. Newport Beach, CA., March 4-7, 2001.