A membrane mirror with transparent electrode for adaptive optics

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5719, Issue , 2005, Pages 155-166

  Kurczynski, Peter ^a,b   Dyson, Harold M ^a,b   Sadoulet, Bernard ^b   Bower, J Eric ^a,c   Lai, Warren Y C ^a,c   Mansfield, William M ^a,c   Taylor, J Ashley ^a,c  

^a LUCENT TECHNOLOGIES   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c New Jersey Nanotechnology Consortium   (United States)

Author keywords

Adaptive optics; Deformable mirrors; MEMS; Micromirrors; MOEMS; Optical MEMS

Indexed keywords

DEFORMABLE MIRRORS; MEMS; MICROMIRRORS; MOEMS; OPTICAL MEMS;

DEFORMATION; ELECTRODES; LIGHT TRANSMISSION; MEMBRANES; MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; MIRRORS; SILICON ON INSULATOR TECHNOLOGY;

ADAPTIVE OPTICS;

EID: 21844477847     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.593234     Document Type: Conference Paper

References (9)

1. N. Doble and D. R. Williams, "The Application of MEMS Technology for Adaptive Optics in Vision Science." IEEE Journal of Selected Topics in Quantum Electronics, Vol. 10, No. 3 2004.
2. R. P. Grosso and M. Yellin, "Membrane mirror as an adaptive optical element," J. Opt. Sci. Am. Vol. 67, pp. 399, 1977.
3. P. Kurczynski, H.M. Dyson, B. Sadoulet, J.E. Bower, W. Y-C Lai, W. M. Mansfield, J. A. Taylor, "Fabrication and measurement of low-stress membrane mirrors for adaptive optics." Applied Optics Vol. 43 (18) 3573-3580, 2004.
4. P. Kurczynski et al. "Electrostatically actuated membrane mirrors for adaptive optics." Proc. SPIE Vol. 4983 pp.305-313 (2003).
5. R. Aberman, "Measurements of the intrinsic stress in thin metal films," Vacuum 41, 1279-1282 (1990).
6. J. Floro, S. Hearne, J. Hunter, P. Kotula, E. Chason, S. Seel, C. Thompson, "The dynamic competition between stress generation and relaxation mechanisms during coalescence of Volmer-Weber thin films," J. Appl. Phys. 89, 4886-4897 (2001).
7. P. Kurczynski. et al., "Membrane mirrors for vision science adaptive optics," SPIE Vol. 4561 pp. 147-162, 2001.
8. S. Timoshenko and S. Woinowsky-Krieger, Theory of Plates and Shells, McGraw-Hill Book Co. Inc., New York, 1959.
9. L. D. Landau and E. M. Lifshitz, Theory of Elasticity Course in Theoretical Physics Vol. 7, Butterworth-Heineman, Boston, 1959.