CFD and reaction computational analysis of the growth of GaN by HVPE method

Journal of Crystal Growth

Volumn 296, Issue 1, 2006, Pages 31-42

  Kempisty, P ^a   Lucznik B ^b   Pastuszka, B ^b   Grzegory, I ^b   Bockowski M ^b   Krukowski, S ^b   Porowski, S ^b  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b INSTITUTE OF HIGH PRESSURE PHYSICS   (Poland)

Author keywords

A1. Surface processes; A3. Hydride vapor phase epitaxy; B1. Gallium compounds; B1. Gallium nitride; B1. Nitrides

Indexed keywords

GAS APPROXIMATION; HYDRIDE VAPOR PHASE EPITAXY (HVPE); SURFACE PROCESSES; VAPOR TRANSPORT;

CHEMICAL REACTIONS; COMPUTATIONAL FLUID DYNAMICS; DIFFUSION; EVAPORATION; MOLECULAR DYNAMICS; VAPOR PHASE EPITAXY;

GALLIUM NITRIDE;

EID: 33749820320     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2006.08.008     Document Type: Article

References (36)

1. Fidap User Manual, Fluent Inc.
2. Nakamura S., Senoh M., and Mukai T. Jpn. J. Appl. Phys. Part-2-Letters. 30 10A (1991) L1708
3. Nakamura S., Mukai T., Senoh M., and Iwasa N. Jpn. J. Appl. Phys. Part-2-Letters. 31 2B (1992) L139
4. Motoki K., Okahisa T., Nakahata S., Matsumoto N., Kimura H., Kasai H., Takemoto K., Uematsu K., Ueno M., Kumagai Y., Koukitu A., and Seki H. Mater. Sci. Eng. B 93 (2002) 123
5. Motoki K., Okahisa T., Nakahata S., Matsumoto N., Kimura H., Kasai H., Takemoto K., Uematsu K., Ueno M., Kumagai Y., Koukitu A., and Seki H. J. Crystal Growth 237-239 (2002) 912
6. Krukowski S., Grzegory I., Bockowski M., Lucznik B., Suski T., Nowak G., Borysiuk J., Wroblewski M., Leszczynski M., Perlin P., Porowski S., and Weyher J.L. Int. J. Mater. Product Technol. 22 (2005) 226
7. Grzegory I. J. Phys.:Condens. Matter 14 (2002) 11055
8. Utsumi W., Saitoh H., Kaneko H., Aoki K., and Shimomura O. Nature Mater. 2 (2003) 735
9. Utsumi W., Saitoh H., Kaneko H., and Kiriyama K. K. Aoki J. Crystal. Soc. Japan. 46 (2004) 297
10. Iwahashi T., Kawamura F., Morishita M., Kai Y., Yoshimura M., Mori Y., and Sasaki T. J. Crystal Growth 253 (2005) 1
11. Vodakov Yu.A., and Mokhov E.N. In: Paskova T., and Monemar B. (Eds). Vacuum Science and Technology: Nitrides as Seen by the Technology (2002), Research Signpost, Trivandrum 59-78
12. Dwikusuma F., Babcock S.E., and Kuech T.F. In: Paskova T., and Monemar B. (Eds). Vacuum Science and Technology: Nitrides as Seen by the Technology (2002), Research Signpost, Trivandrum 79-105
13. B. Lucznik, B. Pastuszka, I. Grzegory, M. Boćkowski, J. Domagała, G. Nowak, P. Prystawko, S. Krukowski, S. Porowski. Proc ICNS Conf. 2005, Bremen, Germany, to be published
14. Lucznik B., Pastuszka B., Grzegory I., Boćkowski M., Kamler G., Litwin-Staszewska E., and Porowski S. J. Crystal Growth 281 (2005) 38
15. Trassoudaine A., Cadoret R., and Gil-Lafon E. J. Crystal Growth 260 (2004) 7
16. Pimpinelli A., Cadoret R., Gil-Lafon E., Napierala J., and Trassoudaine A. J. Crystal Growth 258 (2003) 1
17. Aujol E., Trassoudaine A., Castellouci D., and Cadoret R. Mater. Sci. Eng. B 82 (2001) 65
18. Aujol E., Napierala J., Trassoudaine A., Gil-Lafon E., and Cadoret R. J. Crystal Growth 222 (2001) 538
19. Kumagai Y., Takemoto K., Koukitu A., and Seki H. J. Crystal Growth 222 (2001) 118
20. Kumagai Y., Takemoto K., Hasegawa T., Koukitu A., and Seki H. J. Crystal Growth 231 (2001) 57
21. I. Barin, Thermochemical Data of Pure Substances, 3rd ed., VCH Weinheim, 1994.
22. Treybal R.E. Mass Transfer Operations (1978), McGraw-Hill, New York
23. Levenspiel O. Chemical Reaction Engineering (1972), Wiley, New York
24. Delley B. J. Chem. Phys. 92 (1990) 508
25. Delley B. J. Chem. Phys. 94 (1991) 7245
26. Romanowski Z., Krukowski S., Grzegory I., and Porowski S. J. Crystal Growth 189-190 (1998) 159
27. Romanowski Z., Krukowski S., Grzegory I., and Porowski S. J. Chem. Phys. 114 (2001) 6353
28. Krukowski S., Bockowski M., Lucznik B., Grzegory I., Porowski S., Suski T., and Romanowski Z. J. Phys. Condens. Master. 13 (2001) 8881
29. S. Krukowski, I. Grzegory, M. Bockowski, M. Wroblewski, S. Porowski, J. Crystal Growth, submitted for publication.
30. Truesdell C., and Muncaster R.G. Fundamentals of Maxwell Kinetic Theory of a Simple Monoatomic Gas (1980), Academic Press, New York p. 278
31. Ferziger J.H., and Kaper H.G. Mathematical Theory of Transport Processes in Gases (1972), North-Holland, Amsterdam
32. Cole W.A., and Wakeham W.A. J. Phys. Chem. Ref. Data 14 (1985) 209
33. Stephen K., Krauss R., and Laesecke A. J. Phys. Chem. Ref. Data 16 (1987) 993
34. Boushehri A., Bzowski J., Kestin J., and Mason E.A. J. Phys. Chem. Ref. Data 16 (1987) 445
35. Elam J.W., Nelson C.E., Tolbert M.A., and George S.M. Surf. Sci. 450 (2000) 64
36. Ban V.S. J. Electrochem. Soc. 119 (1972) 761