High resolution profiling using ion scattering and resonant nuclear reactions

AIP Conference Proceedings

Volumn 788, Issue , 2005, Pages 571-578

  Pezzi, R P ^a   Wallace, R M ^b   Copel, M ^c   Baumvol, I J R ^a  

^a FEDERAL UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

^b UNIVERSITY OF TEXAS AT DALLAS   (United States)

^c IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

Depth profiling; Medium energy ion scattering; Resonant Nuclear Reaction Analysis

Indexed keywords

EID: 33749659161     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2063020     Document Type: Conference Paper

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