Dual BIE approaches for modeling electrostatic MEMS problems with thin beams and accelerated by the fast multipole method

Engineering Analysis with Boundary Elements

Volumn 30, Issue 11, 2006, Pages 940-948

  Liu, Y J ^a  

^a University of Cincinnati   (United States)

Author keywords

Boundary element method; Electrostatic problems; Fast multipole method; MEMS

Indexed keywords

BEAM THICKNESS; ELECTROSTATIC PROBLEMS; FAST MULTIPOLE METHODS; SINGLE LAYER POTENTIAL;

ACCELERATION; BOUNDARY ELEMENT METHOD; ELASTICITY; ELECTRIC FIELDS; LIGHT; PROBLEM SOLVING;

MICROELECTROMECHANICAL DEVICES;

EID: 33749600422     PISSN: 09557997     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.enganabound.2006.04.010     Document Type: Article

References (31)

1. Mukherjee S. Boundary element methods in creep and fracture (1982), Applied Science Publishers, New York
2. Cruse T.A. Boundary element analysis in computational fracture mechanics (1988), Kluwer Academic Publishers, Dordrecht, The Netherlands
3. Brebbia C.A., and Dominguez J. Boundary elements-an introductory course (1989), McGraw-Hill, New York
4. Banerjee P.K. The boundary element methods in engineering. 2nd ed (1994), McGraw-Hill, New York
5. Kane J.H. Boundary element analysis in engineering continuum mechanics (1994), Prentice-Hall, Englewood Cliffs, NJ
6. Shi F., Ramesh P., and Mukherjee S. Simulation methods for micro-electro-mechanical structures (MEMS) with application to a microtweezer. Comput Struct 56 5 (1995) 769-783
7. Ye W., and Mukherjee S. Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives. Int J Numer Methods Eng 45 (1999) 175-194
8. Ye W., and Mukherjee S. Design and fabrication of an electrostatic variable gap comb drive in micro-electro-mechanical systems. CMES: Comput Modeling Eng Sci 1 1 (2000) 111-120
9. Shi F., Ramesh P., and Mukherjee S. Dynamic analysis of micro-electro-mechanical systems (MEMS). Int J Numer Methods Eng 39 24 (1996) 4119-4139
10. Aluru N.R., and White J. An efficient numerical technique for electromechanical simulation of complicated microelectromechanical structures. Sensors Actuators A: Phys 58 1 (1997) 1-11
11. Bao Z., and Mukherjee S. Electrostatic BEM for MEMS with thin conducting plates and shells. Eng Anal Boundary Elements 28 12 (2004) 1427-1435
12. Bao Z., and Mukherjee S. Electrostatic BEM for MEMS with thin beams. Commun Numer Methods Eng 21 (2005) 297-312
13. De S.K., and Aluru N.R. Full-Lagrangian schemes for dynamic analysis of electrostatic MEMS. J Microelectromech Syst 13 5 (2004) 737
14. Chyuan S.-W., Liao Y.-S., and Chen J.-T. Computational study of the effect of finger width and aspect ratios for the electrostatic levitating force of MEMS combdrive. J Microelectromech Syst 14 2 (2005) 305-312
15. Rokhlin V. Rapid solution of integral equations of classical potential theory. J Comput Phys 60 (1985) 187-207
16. Greengard L.F., and Rokhlin V. A fast algorithm for particle simulations. J Comput Phys 73 2 (1987) 325-348
17. Greengard L.F. The rapid evaluation of potential fields in particle systems (1988), The MIT Press, Cambridge
18. Nishimura N. Fast multipole accelerated boundary integral equation methods. Appl Mech Rev 55 4 (2002) 299-324
19. Ljung P., Bachtold M., and Spasojevic M. Analysis of realistic large MEMS devices. CMES: Comput Modeling Eng Sci 1 1 (2000) 21-30
20. Frangi A., and Gioia A.D. Multipole BEM for the evaluation of damping forces on MEMS. Comput Mech 37 1 (2005) 24-31
21. Frangi A. A fast multipole implementation of the qualocation mixed-velocity-traction approach for exterior Stokes flows. Eng Anal Boundary Elements 29 11 (2005) 1039-1046
22. Masters N., and Ye W. Fast BEM solution for coupled 3D electrostatic and linear elastic problems. Eng Anal Boundary Elements 28 9 (2004) 1175-1186
23. Ding J., and Ye W. A fast integral approach for drag force calculation due to oscillatory slip stokes flows. Int J Numer Methods Eng 60 9 (2004) 1535-1567
24. Frangi A., and Tausch J. A qualocation enhanced approach for Stokes flow problems with rigid-body boundary conditions. Eng Anal Boundary Elements 29 9 (2005) 886
25. Liu Y.J., and Rudolphi T.J. Some identities for fundamental solutions and their applications to weakly-singular boundary element formulations. Eng Anal Boundary Elements 8 6 (1991) 301-311
26. Krishnasamy G., Rizzo F.J., and Liu Y.J. Boundary integral equations for thin bodies. Int J Numer Methods Eng 37 (1994) 107-121
27. Liu Y.J., and Rizzo F.J. Scattering of elastic waves from thin shapes in three dimensions using the composite boundary integral equation formulation. J Acoust Soc Am 102 2, Part 1 (1997) 926-932
28. Burton A.J., and Miller G.F. The application of integral equation methods to the numerical solution of some exterior boundary-value problems. Proc R Soc London A 323 (1971) 201-210
29. Liu Y.J., and Rizzo F.J. A weakly-singular form of the hypersingular boundary integral equation applied to 3-D acoustic wave problems. Comput Methods Appl Mech Eng 96 (1992) 271-287
30. Liu Y.J., and Nishimura N. The fast multipole boundary element method for potential problems-a tutorial. Eng Anal Boundary Elements 30 (2006) 371-381
31. Hayt W.H., and Buck J.A. Engineering electromagnetics (2001), McGraw Hill, London