Low resistance, unannealed, Ohmic contacts to p-type in 0.27Ga 0.73Sb

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 5, 2006, Pages 2388-2390

  Champlain, James G ^a   Magno, Richard ^a   Boos, J Brad ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT RESISTANCE; HOLE DENSITY; LOW SHEET RESISTANCES; UNANNEALING;

ANNEALING; DOPING (ADDITIVES); HOLE MOBILITY; MICROELECTRONICS; OHMIC CONTACTS;

INDIUM COMPOUNDS;

EID: 33749338729     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2353838     Document Type: Article

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