Time-resolved in situ investigations of reactive sputtering processes by grazing incidence X-ray absorption spectroscopy

Surface Science

Volumn 600, Issue 18, 2006, Pages 4380-4384

  Lützenkirchen Hecht, Dirk ^a   Frahm, Ronald ^a  

^a UNIVERSITY OF WUPPERTAL   (Germany)

Author keywords

In situ analysis; Sputter deposition; Thin films; X ray absorption spectroscopy

Indexed keywords

CHEMICAL BONDS; ELECTRONIC STRUCTURE; MOLECULAR STRUCTURE; SPUTTER DEPOSITION; THIN FILMS; X RAY ANALYSIS;

BOND DISTANCES; IN SITU ANALYSIS; SHORT RANGE STRUCTURE; X-RAY ABSORPTION SPECTROSCOPY;

METALLIC FILMS;

EID: 33748951157     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2006.02.080     Document Type: Article

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