Miniaturized multipurpose cell for in situ investigation of sputtered thin films with x-ray techniques

Review of Scientific Instruments

Volumn 76, Issue 7, 2005, Pages

  Lutzenkirchen Hecht D ^a   Bruder, K ^a   Haake, U ^a   Keil, P ^a   Markert, C ^a   Ringpfeil, C ^a   Frahm, R ^a  

^a UNIVERSITY OF WUPPERTAL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FILM PROPERTIES; IN SITU INVESTIGATION; REACTIVE GASES; SPUTTERED THIN FILMS;

ABSORPTION; FILM GROWTH; FLUORESCENCE; LOW ENERGY ELECTRON DIFFRACTION; REFLECTOMETERS; SPUTTER DEPOSITION; SYNCHROTRON RADIATION; X RAY DIFFRACTION ANALYSIS;

THIN FILMS;

EID: 22944477083     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1942529     Document Type: Article

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