Chemistry and formation process of Ga(Al)As oxide during local anodic oxidation nanolithography

Surface Science

Volumn 600, Issue 18, 2006, Pages 3739-3743

  Lazzarino, M ^a   Mori, G ^a,b   Sorba, L ^a,c   Ercolani, D ^a,c   Biasiol, G ^a   Heun, S ^a   Locatelli, A ^d  

^a LABORATORIO TASC   (Italy)

^b UNIVERSITY OF TRIESTE   (Italy)

^c UNIVERSITY OF MODENA AND REGGIO EMILIA   (Italy)

^d SINCROTRONE TRIESTE   (Italy)

Author keywords

Desorption induced by photon stimulation; Gallium arsenide; Nanopatterning; Oxidation; Photoelectron spectroscopy

Indexed keywords

ANODIC OXIDATION; ATOMIC FORCE MICROSCOPY; MATHEMATICAL MODELS; NANOTECHNOLOGY; PHOTOELECTRON SPECTROSCOPY; PHOTONS; SEMICONDUCTING GALLIUM COMPOUNDS;

GALLIUM ARSENIDE; MELTING PROCESS; NANOPATTERNING; PHOTON STIMULATION;

HETEROJUNCTIONS;

EID: 33748950615     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2006.01.086     Document Type: Article

References (16)

1. Avouris P., Hertel T., and Martel R. Appl. Phys. Lett. 71 (1997) 285
2. Lazzarino M., Heun S., Ressel B., Prince K.C., Pingue P., and Ascoli C. Appl. Phys. Lett. 81 (2002) 2842
3. Okada, et al. J. Appl. Phys. 83 (1997) 1844
4. Tello M., and Garcia R. Appl. Phys. Lett. 83 (2003) 2339
5. Tello M., Garcia R., Martin-Gago J.A., Martinez N.F., Martin-Gonzalez M.S., Aballe L., Barinov A., and Gregoratti L. Adv. Mater. 17 (2005) 1480
6. Okada Y., Amano S., Kawabe M., Shimbo B.N., and Harris J.S. J. Appl. Phys. 83 (1997) 1844
7. Okada Y., Iuchi Y., Kawabe M., and Harris J.S. J. Appl. Phys. 88 (2000) 1136
8. Ercolani D., Lazzarino M., Mori G., Ressel B., Sorba L., Locatelli A., Cherifi S., Ballestrazzi A., and Heun S. Adv. Funct. Mater. 15 (2005) 587
9. Mori G., Lazzarino M., Ercolani D., Sorba L., Heun S., and Locatelli A. J. Appl. Phys. 97 (2005) 114324
10. Lazzarino M., Padovani M., Mori G., Fanetti M., Sorba L., and Sancrotti M. Chem. Phys. Lett. 402 (2005) 155
11. Curson N.J., Nemutudi R., Appleyard N.J., Pepper M., Ritchie D.A., and Jones G.A.C. Appl. Phys. Lett. 78 (2001) 3466
12. Mori G., Lazzarino M., Ercolani D., Biasiol G., and Sorba L. J. Vac. Sci. Technol. B 22 (2004) 570
13. Fuhrer A., Lusher S., Ihn T., Heinzel T., Ensslin K., Wegscheider W., and Bichler M. Nature 413 (2001) 822
14. Mori G., Lazzarino M., Ercolani D., Biasiol G., Sorba L., Heun S., and Locatelli A. J. Appl. Phys. 98 (2005) 114303
15. Mori G., Lazzarino M., Ercolani D., Biasiol G., Locatelli A., Sorba L., and Heun S. Nucl. Instrum. Meth. B 246 (2006) 3944
16. .