Nanometer edge and surface imaging using optical scatter

Precision Engineering

Volumn 27, Issue 1, 2003, Pages 99-102

  Soãres, Schubert ^a  

^a Ultrafast Sensors and Applications   (United States)

Author keywords

Edge detection; Imaging; Radius measurement; Scatter; Surface

Indexed keywords

DIAMOND CUTTING TOOLS; EDGE DETECTION; LIGHT SCATTERING; MICROOPTICS; NANOTECHNOLOGY; OPTICAL FIBERS; SEMICONDUCTOR LASERS;

SURFACE IMAGING;

IMAGING TECHNIQUES;

EID: 0037217629     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0141-6359(02)00185-X     Document Type: Article

References (3)

1. Church E.L., Zavada J.M. Residual surface roughness of diamond-turned optics. Appl. Opt. 14:1975;1788-1795.
2. Bohren C.F., Huffman D.R. Absorption and scattering of light by small particles. New York: Wiley; 1983.
3. Soãres S.F., Baselt D.R., Black J.P., Jungling K.C., Stowell W.K. Float-polishing process and analysis of float-polished quartz. Appl. Opt. 33(1):1994;89-95.