Spin-coating polyimide film on hydrogenated DLC film surface prepared by ion beam deposition method

Materials Transactions

Volumn 47, Issue 7, 2006, Pages 1869-1873

  Tai, Fong Cheng ^a   Lee, Shih Chin ^a   Wei, Che Hung ^b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b TATUNG UNIVERSITY   (Taiwan)

Author keywords

Fourier transform infrared spectrometer spectra; Hydrogenated diamond like carbon film; Polyimide film; Roman spectra

Indexed keywords

FOURIER TRANSFORM INFRARED SPECTROSCOPY; GRAPHITIZATION; ION BEAM ASSISTED DEPOSITION; PLASTIC FILMS; POLYIMIDES; RAMAN SCATTERING; SPIN COATING;

ANNEALING TREATMENT; POLYIMIDE FILMS; STRESS BUFFER; WARPAGE MEASUREMENT;

DIAMOND LIKE CARBON FILMS;

EID: 33748574937     PISSN: 13459678     EISSN: None     Source Type: Journal    
DOI: 10.2320/matertrans.47.1869     Document Type: Conference Paper

References (34)

1. A. Grill: Thin Solid Films 355-356 (1999) 189-193.
2. O. Maier: Prog. Polym. Sci. 26 (2001) 3-65.
3. L. Valentini, E. Braca, J. M. Kenny, G. Fedosenko, J. Engemann, L. Lozzi and S. Santucci: Diamond Relat. Mater. 11 (2002) 1100-1105.
4. Y. H. Cheng, Y. P. Wu, J. G. Chen, X. L. Qiao and C. S. Xie: Diamond Relat. Mater. 8 (1999) 1214-1219.
5. G. A. Abbas, J. A. McLaughlin and E. Harkin-Jones: Diamond Relat. Mater. 13 (2004) 1342-1345.
6. C. Donnet: Surf. Coat. Technol. 100-101 (1998) 180-186.
7. D. R. Tallant, J. E. Parmeter, M. P. Siegal and R. L. Simpson: Diamond Relat. Mater. 4 (1995) 191-199.
8. B. Oral, R. Hauert, U. Muller and K. H. Ernst: Diamond Relat. Mater. 4 (1995) 482-487.
9. R. Wachter and A. Cordery: Diamond Relat. Mater. 8 (1999) 504-509.
10. D. Y. Wang, C. L. Chang and W. Y. Ho: Surf. Coat. Technol. 120-121 (1999) 138-144.
11. M. A. Voronkin, S. N. Dub and V. G. Malogolovets: Diamond Relat. Mater. 4 (1994) 5-9.
12. D. V. Fedoseev and Yu. N. Tolmachev: Diamond Relat. Mater. 5 (1996) 429-432.
13. S. Vasquez, C. A. Achete and C. P. Borges: Diamond Relat. Mater. 6 (1997) 551-554.
14. K. Donnelly, D. P. Dowling and M. L. McConnell: Diamond Relat. Mater. 8 (1999) 538-540.
15. V. M. Elinnson, V. V. Sleptsov and A. N. Laymin: Diamond Relat. Mater. 8 (1999) 2103-2109.
16. S. V. Borucki, W. Jacob and C. A. Achete: Diamond Relat. Mater. 9 (2000) 1971-1978.
17. N. K. Cuong, M. Tahara, N. Yamauchi and T. Sone: Surf. Coat. Technol. 174-175 (2003) 1024-1028.
18. M. Yoshida, T. Tanaka, S. Watanabe, M. Shinohara, J. W. Lee and T. Takagi: Surf. Technol. 174-175 (2003) 1033-1037.
19. A. R. McCabe, A. M. ones and S. J. Bull: Diamond Relat. Mater. 3 (1994) 205-209.
20. Y. Ohgoe, K. K. Hirakuri, K. Tsuchimoto, G. Friedbacher and O. Miyashita: Surf. Coat. Technol. 184 (2004) 263-269.
21. N. K. Cuong, M. Tahara, N. Yamauchi and T. Sone: Surf. Coat. Technol. 193 (2005) 283-287.
22. P. Garrou: IEEE TRANSACTIONS ON ADVANCED PACKING 23 (2000) 198-205.
23. E. Lugscheider, K. Bobzin and M. Moller: Thin Solid Films 355-356 (1999) 367-373.
24. J. Kim, K. Lee, K. Kim, H. Sugimura, O. Takai, Y. Wu and Y. Inoue: Surf. Coat. Technol. 162 (2003) 135-139.
25. L. Ostrovskaya, V. Perevertailo, V. Ralchendo, A. Dementjev and O. Loginova: Diamond Relat. Mater. 11 (2002) 845-850.
26. R. Vuppuladhadium, H. E. Jackon and L. C. Wu: J. Appl. Phys. 77 (1995) 2714-2718.
27. D. R. Tallant, J. E. Parmeter, M. P. Siegal and R. L. Simpson: Diamond Relat. Mater. 4 (1995) 191-199.
28. T. Nishino, M. Kotera, N. Inayoshi, N. Miki and K. Nakamae: Polymer 41 (2000) 6913-6918.
29. M. Amagai: Microelectronics Reliability 40 (2000) 2077-2086.
30. X. L. Peng and T. W. Clyne: Thin Solid Films 312 (1998) 207-218.
31. G. A. Abbas, J. A. McLaughlin and E. Harkin-Iones: Diamond Relat. Mater. 13 (2004) 1342-1345.
32. E. Staryga and G. W. Bak: Diamond Relat. Mater. 14 (2005) 23-34.
33. N. Tomozeiu, A. Har, B. Kleinsorge and W. I. Milne: Diamond Relat. Mater. 8 (1999) 522-526.
34. P. D. Maguire, D. P. Magill. A. A. Ogwu and J. A. McLaughlin: Diamond Relat. Mater. 10 (2001) 216-223.