Analysis of the role of fluorine content on the thermal stability of a-C:H:F thin films

Diamond and Related Materials

Volumn 11, Issue 3-6, 2002, Pages 1100-1105

  Valentini, L ^a   Braca, E ^a   Kenny, J M ^a   Fedosenko, G ^b   Engemann, J ^b   Lozzi, L ^c   Santucci, S ^c  

^a UNIVERSITY OF PERUGIA   (Italy)

^b Forschungszentrum Fur Mikrostrukturtechnik   (Germany)

^c UNIVERSITY OF L'AQUILA   (Italy)

Author keywords

Ellipsometry; Fluorine; Infrared (IR) spectroscopy; Photonelectron spectroscopy

Indexed keywords

ABSORPTION SPECTROSCOPY; ANNEALING; BOND STRENGTH (CHEMICAL); CARBON; DEPOSITION; ENERGY GAP; FLUORINE; GRAPHITIZATION; INFRARED SPECTROSCOPY; RAMAN SCATTERING; THERMODYNAMIC STABILITY; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS CARBON FILMS;

AMORPHOUS FILMS;

CARBON; FILM;

EID: 0036508313     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00735-X     Document Type: Article

References (25)