메뉴 건너뛰기




Volumn 14, Issue 1, 2005, Pages 23-34

Relation between physical structure and electrical properties of diamond-like carbon thin films

Author keywords

Band structure; Diamond like carbon; Electrical properties

Indexed keywords

BAND STRUCTURE; COATINGS; ELECTRIC CONDUCTIVITY; PHOTOCURRENTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON; THIN FILMS;

EID: 9744276855     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.06.030     Document Type: Article
Times cited : (72)

References (112)
  • 1
    • 9744255213 scopus 로고
    • author's certificate July 10; USSR Patent 339 134, May 5 1980
    • B.V. Spitsyn, B.V. Derjaguin, author's certificate July 10 (1956); USSR Patent 339 134, May 5 1980.
    • (1956)
    • Spitsyn, B.V.1    Derjaguin, B.V.2
  • 2
    • 9744238522 scopus 로고
    • US Patents 3030187 and 3030188
    • W. Eversole, US Patents 3030187 and 3030188 (1962).
    • (1962)
    • Eversole, W.1
  • 11
    • 9744287449 scopus 로고    scopus 로고
    • Thesis, Technical Univ. Lódź (in Polish)
    • M. Dłużniewski, Thesis, Technical Univ. Lódź 2000 (in Polish).
    • (2000)
    • Dłuzniewski, M.1
  • 12
    • 9744224084 scopus 로고    scopus 로고
    • The electrical conductivity of thin diamond-like carbon films
    • Lódź (in Polish)
    • E. Staryga, The electrical conductivity of thin diamond-like carbon films, Sci. Bull Tech. Univ. 902, z. 307, Lódź 2002 (in Polish).
    • (2002) Sci. Bull Tech. Univ. , vol.902 , pp. 307
    • Staryga, E.1
  • 17
    • 2342667053 scopus 로고
    • Diamond-like layers produced using plasma-enhanced deposition methods for applications in microelectronics
    • Publish. House Warsaw Univ. Technol., Warsaw (in Polish)
    • J. Szmidt, Diamond-like layers produced using plasma-enhanced deposition methods for applications in microelectronics, in: Sci. Bull. Electronic, vol. 108, Publish. House Warsaw Univ. Technol., Warsaw, 1995, pp. 17-29 (in Polish).
    • (1995) Sci. Bull. Electronic , vol.108 , pp. 17-29
    • Szmidt, J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.