Optical and electrical properties of a-C:H deposited by magnetic confinement of r.f. PECVD plasma

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 522-526

  Tomozeiu, N ^a   Hart, A ^a   Kleinsorge, B ^a   Milne, W I ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Amorphous carbon; Field emission; Magnetic confinement; Material properties

Indexed keywords

CARBON; CURRENT DENSITY; ELECTRIC PROPERTIES; ELECTRON EMISSION; ELECTRON ENERGY LOSS SPECTROSCOPY; EMISSION SPECTROSCOPY; ENERGY GAP; LIGHT EMISSION; MAGNETIC FIELD EFFECTS; OPTICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS;

HYDROGENATED AMORPHOUS CARBON; MAGNETIC CONFINEMENT; OPTICAL EMISSION SPECTROSCOPY (OES);

AMORPHOUS FILMS;

EID: 0032607044     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00446-4     Document Type: Article

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