Numerical analysis of effects of mold features and contact friction on cavity filling in the nanoimprinting process

Journal of Microlithography, Microfabrication and Microsystems

Volumn 5, Issue 1, 2006, Pages

  Hocheng, H ^a   Nien, C C ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Aspect ratio; Contact friction; Finite element method; Mold filling; Mooney Rivlin model; Nanoimprint lithography

Indexed keywords

ASPECT RATIO; FEATURE EXTRACTION; FINITE ELEMENT METHOD; FRICTION; NUMERICAL ANALYSIS; POLYMERS; SUBSTRATES; THROUGHPUT;

CAVITY FILLING; CONTACT FRICTION; MOLD CAVITY; MOONEY-RIVLIN MODEL; NANOIMPRINTING;

MOLDS;

EID: 33748573624     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.2177286     Document Type: Article

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