Dependence of oxygen flow on optical and electrical properties of DC-magnetron sputtered ITO films

Thin Solid Films

Volumn 326, Issue 1-2, 1998, Pages 72-77

  Bender, M ^a   Seelig, W ^a   Daube, C ^b   Frankenberger, H ^b   Ocker, B ^b   Stollenwerk, J ^b  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^b Balzers Prozeß Systeme GmbH   (Germany)

Author keywords

Electrical properties and measurements; Multilayers; Optical properties; Sputtering

Indexed keywords

ELECTRIC CONDUCTIVITY MEASUREMENT; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTING TIN COMPOUNDS;

INDIUM-TIN OXIDE;

THIN FILMS;

EID: 0032482871     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)00521-5     Document Type: Article

References (15)

1. J.L. Vossen, Physics of Thin Films, Vol. 9, 1977.
2. R. Latz, K. Michael, M. Scherer, Int. Conf. Solid State Dev. and Mater., Sendai, 1990.
3. A.L. Dawar, J.C. Joshi, J. Mater. Sci. 19 (1984) 1.
4. H. Hoffmann, J. Pickl, M. Schmidt, D. Krause, J. Appl. Phys. 16 (1978) 239.
5. M. Buchanan, J.B. Webb, D.F. Williams, Appl. Phys. Lett. 37 (2) (1980) 213.
6. B. Heinz, Thesis, Technical University of Aachen, 1991.
7. P. Grosse, Freie Elektronen in Festkörpern, Springer, Berlin, 1970.
8. H. Haitjema, J.J.Ph. Elich, Thin Solid Films 205 (1991) 93.
9. I. Hamberg, C.-G. Granqvist, J. Appl. Phys. 59 (1986) 2950.
10. E. Gerlach, P. Grosse, Festkörperprobleme 17 (1977) 157.
11. A.R. Forouhi, I. Bloomer, Phys. Rev. B 38 (1988) 1865.
12. C.H.L. Wejtens, P.A.C. van Loon, Thin Solid Films 196 (1991) 1.
13. L. Gupta, A. Mansingh, P.K. Srivastava, Thin Solid Films 176 (1989) 33.
14. G. Haacke, J. Appl. Phys. 44 (1973) 4618.
15. H. Hoffmann, A. Dietrich, J. Pickl, D. Krause, J. Appl. Phys. 16 (1978) 381.