Low temperature deposition of ITO thin films by ion beam sputtering

Thin Solid Films

Volumn 377-378, Issue , 2000, Pages 81-86

  Kim, Donghwan ^a   Han, Younggun ^a   Cho, Jun Sik ^b   Koh, Seok Keun ^b  

^a Korea University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ADDITION REACTIONS; COMPOSITION EFFECTS; COMPUTATIONAL METHODS; ENERGY GAP; FILM GROWTH; MICROSTRUCTURE; SEMICONDUCTING INDIUM COMPOUNDS; SPUTTER DEPOSITION; THIN FILMS;

ION BEAM SPUTTERING; OPTICAL BAND GAPS;

SEMICONDUCTING FILMS;

EID: 0034517397     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01388-2     Document Type: Article

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