Influences of thick film inhomogeneities on the ellipsometric parameters

Infrared Physics and Technology

Volumn 49, Issue 1-2, 2006, Pages 39-44

  Roodenko, K ^a   Gensch, M ^a   Heise, H M ^b   Schade, U ^c   Esser, N ^a   Hinrichs, K ^a  

^a ISAS INSTITUTE FOR ANALYTICAL SCIENCES   (Germany)

^b LEIBNIZ INSTITUT FÜR ANALYTISCHE WISSENSCHAFTEN ISAS E V   (Germany)

^c HAHN MEITNER INSTITUT   (Germany)

Author keywords

Degree of polarization; Ellipsometry; Infrared (IR); Partial coherence; Polymer; Synchrotron radiation source

Indexed keywords

ELLIPSOMETRY; INFRARED SPECTROSCOPY; ORGANIC POLYMERS; POLYETHYLENES; SYNCHROTRON RADIATION;

DEGREE OF POLARIZATION; PARTIAL COHERENCES; SYNCHROTRON RADIATION SOURCES;

THICK FILMS;

EID: 33748416899     PISSN: 13504495     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.infrared.2006.01.028     Document Type: Article

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