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Volumn 38, Issue 25, 1999, Pages 5388-5398

Error analysis of null ellipsometry with depolarization

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EID: 0001561491     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.38.005388     Document Type: Article
Times cited : (24)

References (33)
  • 1
    • 0026960616 scopus 로고
    • The effects of incoherent scattering on ellipsom-etry
    • D. H. Goldstein and R. A. Chipman, eds., Proc. SPIE
    • S.-M. F. Nee, “The effects of incoherent scattering on ellipsom-etry,” in Polarization Analysis and Measurement, D. H. Goldstein and R. A. Chipman, eds., Proc. SPIE 1746, 119-127 (1992).
    • (1992) Polarization Analysis and Measurement , vol.1746 , pp. 119-127
    • Nee, S.-M.F.1
  • 2
    • 0028758289 scopus 로고
    • Effects of near-specular scattering on polarim-etry
    • D. H. Goldstein and D. B. Chenault, eds., Proc. SPIE
    • S.-M. F. Nee, “Effects of near-specular scattering on polarim-etry,” in Polarization Analysis and Measurement II, D. H. Goldstein and D. B. Chenault, eds., Proc. SPIE 2265, 304-313 (1994).
    • (1994) Polarization Analysis and Measurement II , vol.2265 , pp. 304-313
    • Nee, S.-M.F.1
  • 3
    • 0000173368 scopus 로고    scopus 로고
    • Polarization of specular reflection and nearspecular scattering by a rough surface
    • S.-M. F. Nee, “Polarization of specular reflection and nearspecular scattering by a rough surface,” Appl. Opt. 35, 3570-3582 (1996).
    • (1996) Appl. Opt. , vol.35 , pp. 3570-3582
    • Nee, S.-M.F.1
  • 4
    • 0026986290 scopus 로고
    • Birefringence characterization using transmission ellipsometry
    • D. H. Goldstein and R. A. Chipman, eds., Proc. SPIE
    • S.-M. F. Nee, “Birefringence characterization using transmission ellipsometry,” in Polarization Analysis and Measurement, D. H. Goldstein and R. A. Chipman, eds., Proc. SPIE 1746, 269-280 (1992).
    • (1992) Polarization Analysis and Measurement , vol.1746 , pp. 269-280
    • Nee, S.-M.F.1
  • 6
    • 0015145333 scopus 로고
    • Ellipsometry with imperfect components including incoherent effects
    • R. M. A. Azzam and N. M. Bashara, “Ellipsometry with imperfect components including incoherent effects,” J. Opt. Soc. Am. 61, 1380-1391 (1971).
    • (1971) J. Opt. Soc. Am. , vol.61 , pp. 1380-1391
    • Azzam, R.M.A.1    Bashara, N.M.2
  • 8
    • 85010089528 scopus 로고    scopus 로고
    • The Measurement, Instrumentation and Sensors Handbook, J. G. Webster, ed. (CRC, Boca Raton, Fla.,), Chap. 60
    • S. -M. F. Nee, “Polarization measurement,” in The Measurement, Instrumentation and Sensors Handbook, J. G. Webster, ed. (CRC, Boca Raton, Fla., 1999), Chap. 60.
    • (1999) Polarization Measurement
    • Nee, S.-M.F.1
  • 9
    • 0031646671 scopus 로고    scopus 로고
    • Characterization of imperfect polarizers under imperfect conditions
    • S. F. Nee, C. Yoo, T. Cole, and D. Burge, “Characterization of imperfect polarizers under imperfect conditions,” Appl. Opt. 37, 57-64 (1998).
    • (1998) Appl. Opt. , vol.37 , pp. 57-64
    • Nee, S.F.1    Yoo, C.2    Cole, T.3    Burge, D.4
  • 10
    • 0009326153 scopus 로고
    • Time resolved ellipsometry
    • G. E. Jellison Jr. and D. H. Lowndes, “Time resolved ellipsometry,” Appl. Opt. 24, 2948-2955 (1985).
    • (1985) Appl. Opt , vol.24 , pp. 2948-2955
    • Jellison, G.E.1    Lowndes, D.H.2
  • 11
    • 84975603522 scopus 로고
    • Depolarization criterion for incoherent scattering
    • A. B. Kostinski, “Depolarization criterion for incoherent scattering,” Appl. Opt. 31, 3506-3508 (1992).
    • (1992) Appl. Opt. , vol.31 , pp. 3506-3508
    • Kostinski, A.B.1
  • 12
    • 0000973619 scopus 로고
    • Polarimetry
    • (McGraw-Hill, New York,), Chap
    • R. A. Chipman, “Polarimetry,” in Handbook of Optics (McGraw-Hill, New York, 1995), Vol. II, Chap. 22.
    • (1995) Handbook of Optics , vol.2 , pp. 22
    • Chipman, R.A.1
  • 13
    • 0032000202 scopus 로고    scopus 로고
    • Depolarization/mixed polarization corrections of ellipsometry spectra
    • U. Rossow, “Depolarization/mixed polarization corrections of ellipsometry spectra,” Thin Solid Films 313-314, 97-101 (1998).
    • (1998) Thin Solid Films , vol.313-314 , pp. 97-101
    • Rossow, U.1
  • 14
    • 43949162669 scopus 로고
    • High precision UV-visible-near-IR Stokes vector spectroscopy
    • J. Th. Zettler, Th. Trepk, L. Spanos, Y. Z. Hu, and W. Richter, “High precision UV-visible-near-IR Stokes vector spectroscopy,” Thin Solid Films 234, 402-407 (1993).
    • (1993) Thin Solid Films , vol.234 , pp. 402-407
    • Zettler, J.T.1    Trepk, T.H.2    Spanos, L.3    Hu, Y.Z.4    Richter, W.5
  • 15
    • 84902079966 scopus 로고
    • Depolarization and cross polarization in el-lipsometry of rough surfaces
    • M. W. Williams, “Depolarization and cross polarization in el-lipsometry of rough surfaces,” Appl. Opt. 25, 3616-3622 (1986).
    • (1986) Appl. Opt. , vol.25 , pp. 3616-3622
    • Williams, M.W.1
  • 17
    • 0032224227 scopus 로고    scopus 로고
    • Polarization of scattering by rough surfaces
    • Z.-H. Gu and A. A. Maradudin, eds., Proc. SPIE
    • S.-M. F. Nee and T. W. Nee, “Polarization of scattering by rough surfaces,” in Scattering and Surface Roughness II, Z.-H. Gu and A. A. Maradudin, eds., Proc. SPIE 3426, 169-180 (1998).
    • (1998) Scattering and Surface Roughness II , vol.3426 , pp. 169-180
    • Nee, S.-M.F.1    Nee, T.W.2
  • 18
    • 0032001221 scopus 로고    scopus 로고
    • Effects of depolarization of optical components on null ellipsometry
    • S.-M. F. Nee and T. Cole, “Effects of depolarization of optical components on null ellipsometry,” Thin Solid Films 313-314, 90-96 (1998).
    • (1998) Thin Solid Films , vol.313-314 , pp. 90-96
    • Nee, S.-M.F.1    Cole, T.2
  • 20
    • 0000228743 scopus 로고
    • Sample depolarization effects from thin films of ZnS on GaAs as measured by spectroscopic ellipsometry
    • G. E. Jellison Jr. and J. W. McCamy, “Sample depolarization effects from thin films of ZnS on GaAs as measured by spectroscopic ellipsometry,” Appl. Phys. Lett. 61, 512-514 (1992).
    • (1992) Appl. Phys. Lett , vol.61 , pp. 512-514
    • Jellison, G.E.1    Mc Camy, J.W.2
  • 21
    • 84904731600 scopus 로고
    • Problem of polarization degree in spectroscopic photometric ellipsometry (Polarimetry)
    • A. Roseler, “Problem of polarization degree in spectroscopic photometric ellipsometry (polarimetry),” J. Opt. Soc. Am. 9, 1124-1131 (1992).
    • (1992) J. Opt. Soc. Am. , vol.9 , pp. 1124-1131
    • Roseler, A.1
  • 22
    • 0005284249 scopus 로고
    • The influences of roughness on film thickness measurements by Mueller matrix ellipsometry
    • D. A. Ramsey and K. C. Ludema, “The influences of roughness on film thickness measurements by Mueller matrix ellipsometry,” Rev. Sci. Instrum. 65, 2874-2881 (1994).
    • (1994) Rev. Sci. Instrum. , vol.65 , pp. 2874-2881
    • Ramsey, D.A.1    Ludema, K.C.2
  • 23
    • 0005807653 scopus 로고    scopus 로고
    • Influence of incoherent superposition of light on ellipsometric coefficients
    • R. Joerger, K. Forcht, A. Gombert, M. Kohl, and W. Graf, “Influence of incoherent superposition of light on ellipsometric coefficients,” Appl. Opt. 36, 319-327 (1997).
    • (1997) Appl. Opt. , vol.36 , pp. 319-327
    • Joerger, R.1    Forcht, K.2    Gombert, A.3    Kohl, M.4    Graf, W.5
  • 24
    • 0005814730 scopus 로고    scopus 로고
    • Realtime control by multiwavelength ellipsometry of plasma-deposited multilayers on glass by use of an incoherent-reflection model
    • M. Kildemo, P. Bulkin, B. Drevillon, and O. Hunderi, “Realtime control by multiwavelength ellipsometry of plasma-deposited multilayers on glass by use of an incoherent-reflection model,” Appl. Opt. 36, 6352-6359 (1997).
    • (1997) Appl. Opt. , vol.36 , pp. 6352-6359
    • Kildemo, M.1    Bulkin, P.2    Drevillon, B.3    Hunderi, O.4
  • 25
    • 0031997479 scopus 로고    scopus 로고
    • Application of the degree of polarization to film thickness gradients
    • U. Richter, “Application of the degree of polarization to film thickness gradients,” Thin Solid Films 313-314, 102-107 (1998).
    • (1998) Thin Solid Films , vol.313-314 , pp. 102-107
    • Richter, U.1
  • 26
    • 0032001219 scopus 로고    scopus 로고
    • Measurement of the absorption edge of thick transparent substrates using the incoherent reflection model and spectroscopic UV-visible-near IR ellipsometry
    • M. Kildemo, R. Ossikovski, and M. Stchakovsky, “Measurement of the absorption edge of thick transparent substrates using the incoherent reflection model and spectroscopic UV-visible-near IR ellipsometry,” Thin Solid Films 313-314, 108-113 (1998).
    • (1998) Thin Solid Films , vol.313-314 , pp. 108-113
    • Kildemo, M.1    Ossikovski, R.2    Stchakovsky, M.3
  • 27
    • 0031998601 scopus 로고    scopus 로고
    • Spectroscopic ellipsometry data analysis: Measured versus calculated quantities
    • G. E. Jellison, Jr., “Spectroscopic ellipsometry data analysis: measured versus calculated quantities,” Thin Solid Films 313-314, 33-39 (1998).
    • (1998) Thin Solid Films , vol.313-314 , pp. 33-39
    • Jellison, G.E.1
  • 28
    • 84975594853 scopus 로고
    • Error reduction for a serious compensator imperfection for null ellipsometry
    • S.-M. F. Nee, “Error reduction for a serious compensator imperfection for null ellipsometry,” J. Opt. Soc. Am. A 8, 314-321 (1991).
    • (1991) J. Opt. Soc. Am. A , vol.8 , pp. 314-321
    • Nee, S.-M.F.1
  • 30
    • 0037934959 scopus 로고
    • Interstellar polarization in an irregularly fluctuating medium
    • S. F. Nee and J. R. Jokipii, “Interstellar polarization in an irregularly fluctuating medium,” Astrophys. J. 234, 140-153 (1979).
    • (1979) Astrophys. J. , vol.234 , pp. 140-153
    • Nee, S.F.1    Jokipii, J.R.2
  • 31
    • 0037597076 scopus 로고
    • Fluctuation theory of starlight polarization
    • S. F. Nee, “Fluctuation theory of starlight polarization,” As-trophys. J. 237, 471-481 (1980).
    • (1980) As-Trophys. J. , vol.237 , pp. 471-481
    • Nee, S.F.1
  • 32
    • 0025759663 scopus 로고
    • A simple high precision extinction method for measuring refractive index of transparent materials
    • H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. New-nam, and M. J. Soileau, eds., Proc. SPIE
    • S. F. Nee and H. E. Bennett, “A simple high precision extinction method for measuring refractive index of transparent materials,” in Laser-Induced Damage in Optical Materials: 1990, H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. New-nam, and M. J. Soileau, eds., Proc. SPIE 1441, 31-37 (1990).
    • (1990) Laser-Induced Damage in Optical Materials: 1990 , vol.1441 , pp. 31-37
    • Nee, S.F.1    Bennett, H.E.2
  • 33
    • 0027652561 scopus 로고
    • Accurate null polarimetry for measuring the refractive index of transparent materials
    • S. F. Nee and H. E. Bennett, “Accurate null polarimetry for measuring the refractive index of transparent materials,” J. Opt. Soc. Am. A 10, 2076-2083 (1993).
    • (1993) J. Opt. Soc. Am. A , vol.10 , pp. 2076-2083
    • Nee, S.F.1    Bennett, H.E.2


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