Infrared spectroscopic ellipsometry: A tool for characterizing nanometer layers

Analyst

Volumn 123, Issue 4, 1998, Pages 647-651

  Korte, E H ^a   Roseler A ^a  

^a LEIBNIZ INSTITUT FÜR ANALYTISCHE WISSENSCHAFTEN ISAS E V   (Germany)

Author keywords

Infrared spectrometric ellipsometry; Layer; Metal; Semiconductor

Indexed keywords

METAL;

ANISOTROPY; CONFERENCE PAPER; ELLIPSOMETRY; INFRARED SPECTROSCOPY; REFRACTION INDEX; SEMICONDUCTOR; SURFACE PROPERTY;

EID: 0031966284     PISSN: 00032654     EISSN: None     Source Type: Journal    
DOI: 10.1039/a707112d     Document Type: Conference Paper

References (16)

1. Röseler, A., Spectroscopic Infrared Ellipsometry, Akademie Verlag, Berlin, 1990.
2. Röseler, A., in Analytiker Taschenbuch, ed. Günzler, H., Bahadir, A. M., Borsdorf, R., Danzer, K., Fresenius, W., Galensz, R., Huber, W., Lüderwald, I., Schwedt, G., Tölg, G., and Wisser, H., Springer, Berlin, 1996, Vol. 14, p. 89.
3. Röseler, A., and Korte, E. H., in 11th International Conference on Fourier Spectroscopy, Conference Proceedings, ed. de Haseth, J. A., American Institute of Physics, Woodbury, NY, in the press.
4. Röseler, A., Dietel, R., and Korte, E. H., Microchim. Acta (Suppl.), 1997, 14, 657.
5. ed. Palik, E. D., Handbook of Optical Constants of Solids, Academic Press, Orlando, FL, 1985.
6. Röseler, A., and Korte, E. H., Thin Solid Films, in the press.
7. Reinberg, A. R., Appl. Opt., 1972, 11, 1273.
8. Hopfe, V., Grählert, W., Brennfleck, K., Korte E. H., and Theiss, W., Fresenius' J. Anal. Chem., 1993, 346, 99.
9. Markwitz, A., Baumann, H., Grill, W., Heinz, B., Röseler, A., Krimmel, E. F., and Bethge, K., Fresenius' J. Anal. Chem., 1995, 353, 734.
10. Azzam R. M. A., and Bashara, N. M., Ellipsometry and Polarized Light, North-Holland, Amsterdam, 1977.
11. Röseler, A., and Korte, E. H., J. Mol. Struct., 1995, 349, 321.
12. Röseler, A., and Korte, E. H., Thin Solid Films, in the press.
13. Röseler, A., and Korte, E. H., Appl. Spectrosc., 1997, 51, 902.
14. Nishikawa, Y., Fujiwara, K., Ataka, K., and Osawa, M., Anal. Chem., 1993, 65, 556.
15. Weidner, M., and Röseler, A., Phys. Status Solidi A, 1992, 130, 115.
16. Angermann, H., Henrion, W., Rebien, M., Fischer, D., Röseler, A., and Zettler, J. T., Thin Solid Films, in the press.