Use of Molecular Vibrations to Analyze Very Thin Films with Infrared Ellipsometry

Journal of Physical Chemistry B

Volumn 108, Issue 12, 2004, Pages 3777-3780

  Tompkins, Harland G ^a   Tiwald, Tom ^a   Bungay, Corey ^a   Hooper, Andrew E ^b  

^a J A WOOLLAM CO INC   (United States)

^b MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GONIOMETERS; INFRARED RADIATION; MERCURY COMPOUNDS; MONOLAYERS; OPTIMIZATION; PARAMETER ESTIMATION; POLYSTYRENES; REFLECTION; SELF ASSEMBLY; SIGNAL TO NOISE RATIO; SILICON WAFERS; SUBSTRATES; THIN FILMS;

INFRARED ELLIPSOMETRY; INFRARED REFLECTION ABSORPTION SPECTROSCOPY (IRAS); ORGANIC FUNCTIONAL GROUPS;

MOLECULAR VIBRATIONS;

EID: 1842788746     PISSN: 15206106     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp035731a     Document Type: Article

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