A highly sensitive multi-dimensional motion measurement system using a spherical reflector

Measurement Science and Technology

Volumn 17, Issue 9, 2006, Pages 2421-2429

  Kwon, Kihwan ^a   Park, Jae Jun ^b   Cho, Nahmgyoo ^c  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b Hanyang University   (South Korea)

^c Hanyang University   (South Korea)

Author keywords

Displacement measurement; Position sensitive detector; Spherical reflector; Three degrees of freedom

Indexed keywords

APPROXIMATION THEORY; ERROR ANALYSIS; MEASUREMENT THEORY; MOTION ESTIMATION; SENSITIVITY ANALYSIS;

DISPLACEMENT MEASUREMENT; POSITION-SENSITIVE DETECTORS; SPHERICAL REFLECTORS; TRANSLATIONAL MOTION;

OPTICAL SENSORS;

APPROXIMATION THEORY; ERROR ANALYSIS; MEASUREMENT THEORY; MOTION ESTIMATION; OPTICAL SENSORS; SENSITIVITY ANALYSIS;

EID: 33747586548     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/17/9/008     Document Type: Article

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