High-resolution multidimensional displacement monitoring system

Optical Engineering

Volumn 36, Issue 8, 1997, Pages 2287-2293

  Lee, Neville K S ^a,b,c   Cai, Yimin ^a,d,e   Joneja, Ajay ^a,f,g  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^c MIT National Magnet Lab   (Hong Kong)

^d SOUTHEAST UNIVERSITY   (China)

^e Chinese Institute of Electronics   (China)

^f INDIAN INSTITUTE OF TECHNOLOGY KANPUR   (India)

^g PURDUE UNIVERSITY   (United States)

Author keywords

Displacement monitors; Precision setups; Quadrant detectors

Indexed keywords

EID: 0000143167     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601521     Document Type: Article

References (11)

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