Magnetic/fluid-bearing stage for atomic-scale motion control (the angstrom stage)

Precision Engineering

Volumn 18, Issue 1, 1996, Pages 38-49

  Holmes, Mike ^a   Trumper, David ^b,c  

^a UNIVERSITY OF NORTH CAROLINA AT CHARLOTTE   (United States)

^b Massachusetts Institute of Technology Cambridge   (United States)

^c MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Angstrom resolution; Magnetically suspended; Precision motion control

Indexed keywords

ACOUSTIC NOISE; ACTUATORS; DEGREES OF FREEDOM (MECHANICS); FEEDBACK; INSULATING OIL; MOTION CONTROL; PERFORMANCE; PRECISION ENGINEERING; PROBES; SCANNING TUNNELING MICROSCOPY; STEP RESPONSE;

ANGSTROM STAGE; ATOMIC SCALE MOTION CONTROL; CAPACITANCE PROBES; ELECTROMAGNETIC ACTUATORS; SUSPENDED PLATEN;

MAGNETIC BEARINGS;

EID: 0029735604     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/0141-6359(95)00038-0     Document Type: Article

References (14)

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