Parallel-plate MEMS mirror design for large on-resonance displacement

2000 IEEE/LEOS International Conference on Optical MEMS

Volumn , Issue , 2000, Pages 93-94

  Bhalotra, S R ^a   Mansell, J D ^a   Kung, H L ^a   Miller, D A B ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009010202     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2000.879642     Document Type: Conference Paper

References (4)

1. C. Liu and Y. W. Yi, "Micromachined magnetic actuators using electroplated permalloy," IEEE Transactions on Magnetics, 35, 1976 (1999).
2. th International Conference on Solid-State Sensors and Actuators (Transducers '93), 120 (1993).
3. O. Manzardo, H. P. Herzig, C. R. Marxer, and N. F. de Rooij, "Miniaturized time-scanning Fourier transform spectrometer based on silicon technology," Optics Letters, 24, 1705 (1999).
4. M. Horenstein, T. Bifano, J. Perreault, and M. R. Krishnamoorthy, "Real time optical correction using electrostatically actuated MEMS devices," Journal of Electrostatics, 46, 91 (1999).