Modeling of an electrostatic torsional actuator: Demonstrated with an RF MEMS switch

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 337-346

  Sattler, Robert ^a   Plötz, Florian ^b   Fattinger, Gernot ^b   Wachutka, Gerhard ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

^b INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

Macromodel; Squeeze film damping; Switch; Transient

Indexed keywords

COMPUTER SIMULATION; DEGREES OF FREEDOM (MECHANICS); ELECTROSTATIC DEVICES; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE MODELS; SWITCHES; TRANSIENTS;

ELECTROMECHANICAL SWITCHES; MACROMODELS; SQUEEZE FILM DAMPING EFFECTS;

MICROACTUATORS;

EID: 0036544233     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00852-4     Document Type: Conference Paper

References (13)

1. Performance of low-loss RF MEMS capacitive switches
2. Design of low actuation voltage RF MEMS switch
3. A surface micromachined miniature switch for telecommunications applications with signal frequencies from dc up to 4 GHz
4. A low voltage actuated micromachined microwave switch using torsion springs and leverage
5. A low-voltage torsional actuator for application in RF-microswitches
6. Tailored modeling: A way to the virtual transducer fab
7. A study of squeeze-film damping
8. Control positioning of torsional electrostatic actuators by current driving
9. New current drive method to extend the stable operation range of electrostatic actuators: Experimental verification
10. Analysis of unstable behaviour occuring in electromechanical microdevices
11. A low-voltage torsional actuator for application in RF-microswitches