Buried electrode electroacoustic technology for the fabrication of thin film based resonant components

Journal of Micromechanics and Microengineering

Volumn 16, Issue 9, 2006, Pages 1869-1874

  Martin, D M ^a   Yantchev, V ^a   Katardjiev, I ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTOELECTRIC EFFECTS; MICROELECTRODES; PIEZOELECTRIC DEVICES; RESONATORS; TUNGSTEN;

FILM PLATE ACOUSTIC RESONATORS (FPAR); RESONANT STRUCTURES; SOLIDITY MOUNTED BULK ACOUSTIC RESONATORS (SBAR);

THIN FILM CIRCUITS;

EID: 33747314440     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/9/016     Document Type: Article

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