Shear mode AlN thin film electroacoustic resonator for biosensor applications

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2005, Pages 50-53

  Wingqvist, G ^a   Bjurstrom J ^a   Katardjiev, I ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

AlN; Biosensor; Component; FEAR; Quasishear polarased acoustic wave; Thickness mode resonator; Tilted films

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; ALUMINUM COMPOUNDS; BIOSENSORS; FILM GROWTH; NATURAL FREQUENCIES; THIN FILMS;

BIOANALYTICAL TOOLS; QUASISHEAR POLARASED ACOUSTIC WAVES; THICKNESS MODE RESONATORS; TILTED FILMS;

RESONATORS;

EID: 33747243060     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2005.1602793     Document Type: Conference Paper

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