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Volumn 54, Issue 8, 2006, Pages 3378-3386

Physics-based wideband predictive compact model for inductors with high amounts of dummy metal fill

Author keywords

Dummy metal fill cells; Integrated circuits (ICs); On chip inductors; On wafer microwave measurements; Tiling

Indexed keywords

CMOS INTEGRATED CIRCUITS; EDDY CURRENTS; ELECTRIC INDUCTORS; INDUCTANCE; MICROWAVES;

EID: 33747301142     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2006.877831     Document Type: Article
Times cited : (30)

References (40)
  • 1
    • 0025474604 scopus 로고
    • Si IC-compatible inductors and LC passive filters
    • Aug.
    • N. M. Nguyen and R. G. Meyer, "Si IC-compatible inductors and LC passive filters," IEEE J. Solid-State Circuits, vol. 25, no. 8, pp. 1028-1031, Aug. 1990.
    • (1990) IEEE J. Solid-state Circuits , vol.25 , Issue.8 , pp. 1028-1031
    • Nguyen, N.M.1    Meyer, R.G.2
  • 2
    • 0038546678 scopus 로고    scopus 로고
    • On the design of RF spiral inductors on silicon
    • Mar.
    • J. N. Burghartz and B. Rejaei, "On the design of RF spiral inductors on silicon," IEEE Trans. Electron Devices, vol. 50, no. 3, pp. 718-729, Mar. 2003.
    • (2003) IEEE Trans. Electron Devices , vol.50 , Issue.3 , pp. 718-729
    • Burghartz, J.N.1    Rejaei, B.2
  • 4
    • 1342286928 scopus 로고    scopus 로고
    • Experimental analysis of the effect of metal thickness on the quality factor in integrated spiral inductors for RF ICs
    • Feb.
    • Y.-S. Choi and J.-B. Yoon, "Experimental analysis of the effect of metal thickness on the quality factor in integrated spiral inductors for RF ICs," IEEE Electron Device Lett., vol. 25, no. 2, pp. 76-78, Feb. 2004.
    • (2004) IEEE Electron Device Lett. , vol.25 , Issue.2 , pp. 76-78
    • Choi, Y.-S.1    Yoon, J.-B.2
  • 5
    • 8344246988 scopus 로고    scopus 로고
    • The impact of an aluminum top layer on inductors integrated in an advanced CMOS copper backend
    • Nov.
    • L. F. Tiemeijer, R. J. Havens, Y. Bouttement, and H. J. Pranger, "The impact of an aluminum top layer on inductors integrated in an advanced CMOS copper backend," IEEE Election Device Lett., vol. 52, no. 11, pp. 722-724, Nov. 2004.
    • (2004) IEEE Election Device Lett. , vol.52 , Issue.11 , pp. 722-724
    • Tiemeijer, L.F.1    Havens, R.J.2    Bouttement, Y.3    Pranger, H.J.4
  • 6
    • 0034823547 scopus 로고    scopus 로고
    • Analysis of current crowding effects in multiturn spiral inductors
    • Jan.
    • W. B. Kuhn and N. M. Ibrahim, "Analysis of current crowding effects in multiturn spiral inductors," IEEE Trans. Microw. Theory Tech., vol. 49, no. 1, pp. 31-38, Jan. 2001.
    • (2001) IEEE Trans. Microw. Theory Tech. , vol.49 , Issue.1 , pp. 31-38
    • Kuhn, W.B.1    Ibrahim, N.M.2
  • 8
    • 0035362435 scopus 로고    scopus 로고
    • Spiral inductors on Si p/p+ substrates with resonant frequency of 20 GHz
    • Jun.
    • H.-S. Kim, D. Zheng, A. J. Becker, and Y.-H. Xie, "Spiral inductors on Si p/p+ substrates with resonant frequency of 20 GHz," IEEE Electron Device. Lett., vol. 22, no. 6, pp. 275-277, Jun. 2001.
    • (2001) IEEE Electron Device. Lett. , vol.22 , Issue.6 , pp. 275-277
    • Kim, H.-S.1    Zheng, D.2    Becker, A.J.3    Xie, Y.-H.4
  • 10
    • 0032075292 scopus 로고    scopus 로고
    • On-chip spiral inductors with patterned ground shields for Si-based RFIC's
    • May
    • C. P. Yue and S. S. Wong, "On-chip spiral inductors with patterned ground shields for Si-based RFIC's," IEEE J. Solid-State Circuits, vol. 33, no. 5, pp. 743-751, May 1998.
    • (1998) IEEE J. Solid-state Circuits , vol.33 , Issue.5 , pp. 743-751
    • Yue, C.P.1    Wong, S.S.2
  • 11
    • 0036920267 scopus 로고    scopus 로고
    • Record Q symmetrical inductors for 10 GHz LC-VCO's in 0.18 μm gate-length CMOS
    • Dec.
    • L. F. Tiemeijer, R. J. Havens, N. Pavlovic, and D. M. W. Leenaerts, "Record Q symmetrical inductors for 10 GHz LC-VCO's in 0.18 μm gate-length CMOS," IEEE Election Device Lett., vol. 23, no. 12, pp. 713-715, Dec. 2002.
    • (2002) IEEE Election Device Lett. , vol.23 , Issue.12 , pp. 713-715
    • Tiemeijer, L.F.1    Havens, R.J.2    Pavlovic, N.3    Leenaerts, D.M.W.4
  • 12
    • 0036073186 scopus 로고    scopus 로고
    • Effects of dummy patterns and substrate on spiral inductors for sub-micron RF ICs
    • J.-H. Chang, Y.-S. Youn, H.-K. Yu, and C.-K. Kim, "Effects of dummy patterns and substrate on spiral inductors for sub-micron RF ICs," in IEEE MTT-S Int. Microw. Symp. Dig., 2002, pp. 529-532.
    • (2002) IEEE MTT-S Int. Microw. Symp. Dig. , pp. 529-532
    • Chang, J.-H.1    Youn, Y.-S.2    Yu, H.-K.3    Kim, C.-K.4
  • 14
  • 15
  • 16
    • 0016070156 scopus 로고
    • Design of planar rectangular microelectronic inductors
    • Jun.
    • H. M. Greenhouse, "Design of planar rectangular microelectronic inductors," IEEE Trans. Parts, Hybrids, Packag., vol. PHP-10, no. 2, pp. 101-109, Jun. 1974.
    • (1974) IEEE Trans. Parts, Hybrids, Packag. , vol.PHP-10 , Issue.2 , pp. 101-109
    • Greenhouse, H.M.1
  • 18
    • 0032186601 scopus 로고    scopus 로고
    • Analysis, design, and optimization of spiral inductors and transformers for Si RFIC's
    • Oct.
    • A. M. Niknejad and R. G. Meijer, "Analysis, design, and optimization of spiral inductors and transformers for Si RFIC's," IEEE J. Solid-State Circuits, vol. 33, no. 10, pp. 1470-1480, Oct. 1998.
    • (1998) IEEE J. Solid-state Circuits , vol.33 , Issue.10 , pp. 1470-1480
    • Niknejad, A.M.1    Meijer, R.G.2
  • 20
    • 0036176955 scopus 로고    scopus 로고
    • Physics-based closed-form inductance expression for compact modeling of integrated spiral inductors
    • Jan.
    • S. Jenei, B. K. J. C. Nauwelaers, and S. Decoutere, "Physics-based closed-form inductance expression for compact modeling of integrated spiral inductors," IEEE J. Solid-State Circuits, vol. 37, no. 1, pp. 77-80, Jan. 2002.
    • (2002) IEEE J. Solid-state Circuits , vol.37 , Issue.1 , pp. 77-80
    • Jenei, S.1    Nauwelaers, B.K.J.C.2    Decoutere, S.3
  • 21
    • 84948985229 scopus 로고    scopus 로고
    • New accurate physics-based closed-form expressions for compact modelling and design of on-chip spiral inductors
    • Dec.
    • S. Asgaran, "New accurate physics-based closed-form expressions for compact modelling and design of on-chip spiral inductors," in Proc. 14th Int. Microelectron. Conf., Dec. 2002, pp. 247-250.
    • (2002) Proc. 14th Int. Microelectron. Conf. , pp. 247-250
    • Asgaran, S.1
  • 22
    • 33747239107 scopus 로고    scopus 로고
    • Modelling of integrated inductors with a coplanar ground plane using the PEEC method
    • P. Leduc, A. Schellmanns, D. Magnon, and F. Guitton, "Modelling of integrated inductors with a coplanar ground plane using the PEEC method," in Proc. 33rd Eur. Microw. Conf., 2003, pp. 447-450.
    • (2003) Proc. 33rd Eur. Microw. Conf. , pp. 447-450
    • Leduc, P.1    Schellmanns, A.2    Magnon, D.3    Guitton, F.4
  • 23
    • 0033875648 scopus 로고    scopus 로고
    • Physical modeling of spiral inductors on silicon
    • Mar.
    • C. P. Yue and S. S. Wong, "Physical modeling of spiral inductors on silicon," IEEE Trans. Electron Devices, vol. 47, no. 3, pp. 560-568, Mar. 2000.
    • (2000) IEEE Trans. Electron Devices , vol.47 , Issue.3 , pp. 560-568
    • Yue, C.P.1    Wong, S.S.2
  • 24
    • 0034823548 scopus 로고    scopus 로고
    • Analysis of eddy-current losses over conductive substrates with applications to monolithic inductors and transformers
    • Jan.
    • A. M. Niknejad and R. G. Meijer, "Analysis of eddy-current losses over conductive substrates with applications to monolithic inductors and transformers," IEEE Trans. Microw. Theory Tech., vol. 49, no. 1, pp. 166-176, Jan. 2001.
    • (2001) IEEE Trans. Microw. Theory Tech. , vol.49 , Issue.1 , pp. 166-176
    • Niknejad, A.M.1    Meijer, R.G.2
  • 27
    • 2442519328 scopus 로고    scopus 로고
    • Modelling spiral inductors in SOS processes
    • May
    • W. B. Kuhn, X. He, and M. Mojarradi, "Modelling spiral inductors in SOS processes," IEEE Trans. Electron Devices, vol. 51, no. 5, pp. 677-683, May 2004.
    • (2004) IEEE Trans. Electron Devices , vol.51 , Issue.5 , pp. 677-683
    • Kuhn, W.B.1    He, X.2    Mojarradi, M.3
  • 28
    • 13344280989 scopus 로고    scopus 로고
    • Analysis and synthesis of on-chip spiral inductors
    • Feb.
    • N. A. Talwalkar, C. P. Yue, and S. S. Wong, "Analysis and synthesis of on-chip spiral inductors," IEEE Trans. Electron Devices, vol. 52, no. 2, pp. 176-182, Feb. 2005.
    • (2005) IEEE Trans. Electron Devices , vol.52 , Issue.2 , pp. 176-182
    • Talwalkar, N.A.1    Yue, C.P.2    Wong, S.S.3
  • 30
    • 0036540041 scopus 로고    scopus 로고
    • Miniature 3-D inductors in standard CMOS process
    • Apr.
    • C.-C. Tang, C.-H. Wu, and S.-I. Liu, "Miniature 3-D inductors in standard CMOS process," IEEE J. Solid-State Circuits, vol. 37, no. 4, pp. 471-480, Apr. 2002.
    • (2002) IEEE J. Solid-state Circuits , vol.37 , Issue.4 , pp. 471-480
    • Tang, C.-C.1    Wu, C.-H.2    Liu, S.-I.3
  • 31
    • 0000608170 scopus 로고    scopus 로고
    • Differentially driven symmetric microstrip inductors
    • Jan.
    • M. Danesh and J. R. Long, "Differentially driven symmetric microstrip inductors," IEEE Trans. Microw. Theory Tech., vol. 50, no. 1, pp. 332-341, Jan. 2002.
    • (2002) IEEE Trans. Microw. Theory Tech. , vol.50 , Issue.1 , pp. 332-341
    • Danesh, M.1    Long, J.R.2
  • 32
    • 0015112483 scopus 로고
    • Variation of microstrip losses with thickness on strip
    • Aug.
    • R. Horton, B. Easter, and A. Gopinath, "Variation of microstrip losses with thickness on strip," Electron. Lett., vol. 7, no. 17, pp. 490-491, Aug. 1971.
    • (1971) Electron. Lett. , vol.7 , Issue.17 , pp. 490-491
    • Horton, R.1    Easter, B.2    Gopinath, A.3
  • 33
    • 0037358625 scopus 로고    scopus 로고
    • Microstrip conductor loss models for electromagnetic analysis
    • Mar.
    • J. C. Rautio and V. Demir, "Microstrip conductor loss models for electromagnetic analysis," IEEE Trans. Microw. Theory Tech., vol. 51, no. 3, pp. 915-921, Mar. 2003.
    • (2003) IEEE Trans. Microw. Theory Tech. , vol.51 , Issue.3 , pp. 915-921
    • Rautio, J.C.1    Demir, V.2
  • 35
    • 0041862764 scopus 로고    scopus 로고
    • A simple wideband on-chip inductor model for silicon-based RF ICs
    • Sep.
    • J. Gil and H. Shin, "A simple wideband on-chip inductor model for silicon-based RF ICs," IEEE Trans. Microw. Theory Tech., vol. 51, no. 9, pp. 2023-2027, Sep. 2003.
    • (2003) IEEE Trans. Microw. Theory Tech. , vol.51 , Issue.9 , pp. 2023-2027
    • Gil, J.1    Shin, H.2
  • 36
    • 0029719729 scopus 로고    scopus 로고
    • A compact equivalent circuit model for the skin effect
    • S. Kim and D. Neikirk, "A compact equivalent circuit model for the skin effect," in IEEE MTT-S Int. Microw. Symp. Dig., 1996, pp. 1815-1818.
    • (1996) IEEE MTT-S Int. Microw. Symp. Dig. , pp. 1815-1818
    • Kim, S.1    Neikirk, D.2
  • 37
    • 0038718677 scopus 로고    scopus 로고
    • Analysis of on-chip spiral inductors using the distributed capacitance model
    • Jun.
    • C.-H. Wu, C.-C. Tang, and S.-I. Liu, "Analysis of on-chip spiral inductors using the distributed capacitance model," IEEE J. Solid-State Circuits, vol. 38, no. 6, pp. 1040-1044, Jun. 2003.
    • (2003) IEEE J. Solid-state Circuits , vol.38 , Issue.6 , pp. 1040-1044
    • Wu, C.-H.1    Tang, C.-C.2    Liu, S.-I.3
  • 39
    • 14544271409 scopus 로고    scopus 로고
    • Comparison of the 'pad-open-short' and 'open-short-load' de-embedding techniques for accurate on-wafer RF characterization of high quality passives
    • Feb.
    • L. F. Tiemeijer, R. J. Havens, A. B. M. Jansman, and Y. Bouttement, "Comparison of the 'pad-open-short' and 'open-short-load' de-embedding techniques for accurate on-wafer RF characterization of high quality passives," IEEE Trans. Microw. Theory Tech., vol. 53, no. 2, pp. 723-729, Feb. 2005.
    • (2005) IEEE Trans. Microw. Theory Tech. , vol.53 , Issue.2 , pp. 723-729
    • Tiemeijer, L.F.1    Havens, R.J.2    Jansman, A.B.M.3    Bouttement, Y.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.