Effects of dummy patterns and substrate on spiral inductors for sub-micron RF ICs

IEEE MTT-S International Microwave Symposium Digest

Volumn 1, Issue , 2002, Pages 529-532

  Chang, Jae Hong ^a,b   Youn, Yong Sik ^b   Yu, Hyun Kyu ^b   Kim, Choong Ki ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EDDY CURRENTS; ELECTRIC INDUCTORS; ETCHING; POLYSILICON; SEMICONDUCTOR DOPING;

DUMMY PATTERNS; GROUND SHIELD; SPIRAL INDUCTORS;

CMOS INTEGRATED CIRCUITS;

EID: 0036073186     PISSN: 0149645X     EISSN: None     Source Type: Journal    
DOI: 10.1109/MWSYM.2002.1011673     Document Type: Article

References (11)

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11. Modeling of metal and substrate losses in CMOS and BiCMOS inductors for RFICs