Characterization of spiral inductors with patterned floating structures

IEEE Transactions on Microwave Theory and Techniques

Volumn 52, Issue 5, 2004, Pages 1375-1381

  Chang, Chiaming Alex ^a   Tseng, Sung Pi ^a   Chuang, Jun Yi ^a   Jiang, Shiue Shr ^a   Yeh, J Andrew ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Floating structures; Inductor; Metal pole; Model; Patterned trench isolation

Indexed keywords

AMPLIFIERS (ELECTRONIC); BUTENES; FREQUENCIES; MICROPROCESSOR CHIPS; POLYIMIDES; SEMICONDUCTOR JUNCTIONS; SILICON; VARIABLE FREQUENCY OSCILLATORS;

FLOATING STRUCTURES; METAL POLES; PATTERNED TRENCH ISOLATION;

ELECTRIC INDUCTORS;

EID: 2542440700     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2004.827002     Document Type: Article

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