Spiral inductor performance in deep-submicron bulk-CMOS with copper interconnects

IEEE MTT-S International Microwave Symposium Digest

Volumn 1, Issue , 2002, Pages 301-304

  Kuhn, William B ^a   Orsborn, Aaron W ^a   Peterson, Matthew C ^a   Kythakyapuzha, Shobak R ^a   Hussein, Aziza I ^a   Zhang, Jun ^a   Li, Jianming ^a   Shumaker, Eric A ^a   Nair, Nandakumar C ^a  

^a Kansas State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; COPPER; ELECTRIC INDUCTORS; METALLIZING; OPTIMIZATION; SEMICONDUCTOR DEVICE MANUFACTURE;

COPPER INTERCONNECTS; SELF RESONANT FREQUENCY; SPIRAL INDUCTOR;

CMOS INTEGRATED CIRCUITS;

EID: 0036073118     PISSN: 0149645X     EISSN: None     Source Type: Journal    
DOI: 10.1109/MWSYM.2002.1011617     Document Type: Article

References (9)

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5. Spiral inductor substrate loss modeling in silicon RFICs
6. A 1.8-GHz low-phase-noise CMOS VCO using optimized hollow spiral inductors
7. Analytical modeling of current crowding effects in multi-turn spiral inductors
8. Modeling of inductors and transformers