Ultrahigh depth resolution secondary ion mass spectrometry with sub-keV grazing O2+ beams

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 1, 1998, Pages 373-376

  Alkemade, P F A ^a   Jiang, Z X ^a   Visser, C C G ^a   Radelaar, S ^a   Arnoldbik, W M ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b UTRECHT UNIVERSITY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001300115     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (17)

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