Proton beam writing using the high energy ion nanoprobe LIPSION

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 231, Issue 1-4, 2005, Pages 372-377

  Menzel, F ^a   Spemann, D ^a   Lenzner, J ^a   Vogt, J ^a   Butz, T ^a  

^a UNIVERSITY OF LEIPZIG   (Germany)

Author keywords

Dose normalization; Ionoluminescence; Proton beam writing; SU 8

Indexed keywords

ASPECT RATIO; HELIUM; HIGH ENERGY PHYSICS; IONS; LUMINESCENCE; NANOSTRUCTURED MATERIALS;

DOSE NORMALIZATION; IONOLUMINESCENCE; PROTON BEAM WRITING; SU-8;

PROTON BEAMS;

EID: 33644605937     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.01.085     Document Type: Conference Paper

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