Creating sub-surface channels in PMMA with ion beam lithography in only one step

Applied Surface Science

Volumn 217, Issue 1-4, 2003, Pages 289-293

  Gonin, Yvan ^a   Munnik, Frans ^a   Benninger, Frédéric ^a   Mikhaïlov, Sergueï ^a  

^a Ecole d'Ingenieurs de l'Arc Jurassien   (Switzerland)

Author keywords

Ion beam lithography; Micromachining; Microstructure; PMMA; Sub surface channel

Indexed keywords

ENERGY TRANSFER; ION BEAM LITHOGRAPHY; IRRADIATION; MICROMACHINING; MICROSTRUCTURE; PROTONS;

MICROTUNNELS;

PHOTORESISTS;

EID: 0038539369     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00534-8     Document Type: Article

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