|
Volumn 45, Issue 7, 2006, Pages 5894-5901
|
Deposition and properties of the pseudobinary alloy (Al2O 3)x(TiO2)1-x and its application for silicon surface passivation
|
Author keywords
Chemical solution deposition (CSD); Metal oxides; MIS structure; Negative fixed charge; Surface passivation; Thin films
|
Indexed keywords
DEPOSITION;
ELECTRIC PROPERTIES;
ELECTRICAL ENGINEERING;
OPTICAL PROPERTIES;
PASSIVATION;
SILICON COMPOUNDS;
SPIN COATING;
THIN FILMS;
CHEMICAL SOLUTION DEPOSITION (CSD);
METAL OXIDES;
MIS STRUCTURE;
NEGATIVE FIXED CHARGE;
SURFACE PASSIVATION;
ALUMINUM ALLOYS;
|
EID: 33746826483
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.45.5894 Document Type: Article |
Times cited : (12)
|
References (25)
|