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Volumn 45, Issue 7, 2006, Pages 5894-5901

Deposition and properties of the pseudobinary alloy (Al2O 3)x(TiO2)1-x and its application for silicon surface passivation

Author keywords

Chemical solution deposition (CSD); Metal oxides; MIS structure; Negative fixed charge; Surface passivation; Thin films

Indexed keywords

DEPOSITION; ELECTRIC PROPERTIES; ELECTRICAL ENGINEERING; OPTICAL PROPERTIES; PASSIVATION; SILICON COMPOUNDS; SPIN COATING; THIN FILMS;

EID: 33746826483     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.5894     Document Type: Article
Times cited : (12)

References (25)
  • 24
    • 33746793786 scopus 로고    scopus 로고
    • European patent No. 04447148.0-2203
    • European patent No. 04447148.0-2203 (2004).
    • (2004)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.