Corner compensation techniques in anisotropic etching of (100)-silicon using aqueous KOH

Transducers '91

Volumn , Issue , 1991, Pages 456-459

  Sandmaier, H ^a   Offereins, H L ^a   Kuhl, K ^a   Lang, W ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALS; METAL CUTTING - MICROMACHINING; PRESSURE TRANSDUCERS; SENSORS - SILICON SENSORS; SILICON AND ALLOYS - ETCHING;

ANISOTROPIC ETCHING; CORNER COMPENSATION TECHNIQUES; PIEZORESISTIVE PRESSURE SENSOR;

ELECTROMECHANICAL DEVICES;

EID: 0026370925     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)