Elaboration of transparent conductive oxide films for flexible organic electroluminescent devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6192, Issue , 2006, Pages

  Lucas, Bruno ^a   Rammal, Wassim ^a   El Amrani, Aumeur ^a   Moliton, André ^a   Séguy, Isabelle ^b  

^a UNIVERSITY OF LIMOGES   (France)

^b UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

Electrical and Optical properties; Flexible substrate; FOLEDs; IBS technology; ITO films; X ray diffraction

Indexed keywords

DEPOSITION; INTERFACES (MATERIALS); LIGHT EMITTING DIODES; POLYETHYLENE TEREPHTHALATES; SPUTTERING; SUBSTRATES; THERMAL EFFECTS; THIN FILMS; X RAY DIFFRACTION;

FLEXIBLE SUBSTRATE; FOLEDS; IBS TECHNOLOGY; ITO FILMS;

ELECTROOPTICAL DEVICES;

EID: 33746681268     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.661751     Document Type: Conference Paper

References (21)

1. V.Craciun, D. Craciun, Z.Chen, J. Hwang, R.K. Singh, "Room temperature growth of indium tin oxide thin films by ultraviolet-assisted pulsed laser deposition", Applied Surface Science, 168, 118-122, 2000.
2. F.O. Adurodija, H. Izumi, T. Ishihara, H. Yoshioka, H. Matsui, M. Motoyama, "Low-temperature growth of low-resistivity indium-tin-oxide thin films by pulsed laser deposition", Vacuum, 59, 641-648, 2000.
3. W.F. Wu, B.S. Chiou, "Effect of oxygen concentration in the sputtering ambient on the microstructure, electrical and optical properties of radio-frequency magnetron sputtered indium tin oxide films", Semicon. Sci. Technol., 11, 1317, 1996.
4. L.J. Meng, A. Maçarico, R. Martins, "Study of annealed indium tin oxide films prepared by rf reactive magnetron sputtering", Vacuum, 46, 673-680, 1995.
5. J.L. Huang, Y.T. Jah, C.Y. Chen, B.S. Yau, S.S. Lin, "Reactive Magnetron sputtering of indium tin oxide films on acrylics - Electrical Resistivity and Optical Properties", Journal of Materials Engineering and Performance, 9, 424, 2000.
6. D.Kim, Y. Han, J.S. Cho, S.K.Koh, "Low temperature deposition of ITO thin film by ion beam sputtering", Thin Solid Films, 377, 81-86, 2000.
7. Y. Han, D. Kim, J.S. Cho, S.K. Koh, Y.S. Song, "Tin-doped indium oxide(ITO) film deposition by ion beam sputtering", Sol. Energy Mater. Sol. Cells, 65, 211-218, 2001.
8. D.-F. Lii, J.-L. Huang, I.-J. Jen, S.-S. Lin, P. Sajgalik, "Effects of annealing on the properties of indium-tin oxide films prepared by ion beam sputtering", Surface & Coatings Technology, 192, 106-111, 2005.
9. J.R. McNeil, J.J. McNally, P.D. Reader, Handbook of thin-film deposition processes and techniques, Edited by Klaus K. Schwegraf, Chapter 12, 364-393, 1998.
10. J.C.C. Fan, J.B. Goodenough, "X-ray photoemission spectroscopy studies of Sn doped indium oxide films, J. App. Phys., 48, 3524, 1977.
11. Y. Han, D. Kim, J.-S. Cho, S.-K. Koh, "Ultraflat indium tin oxide films prepared by ion beam sputtering", Thin Solid Films, 473, 218-223, 2005.
12. B. Lucas, W. Rammal, A. Moliton, "ITO films realized at room-temperature by Ion Sputtering for high-performance flexible organic light-emitting diodes", EPJ Applied Physics, accepted for publication, in press, 2006.
13. S. Ohno, Y. Kawaguchi, A. Miyamura, Y. Sato, P.K. Song, M. Yoshikawa, P. Frach, Y. Shigesato, "High rate deposition of tin-doped indium oxide films by reactive magnetron sputtering with unipolar pulsing and plasma emission feedback systems", Science and Technology of Advanced Materials, 7, 56-61, 2006.
14. H. R. Fallah, M. Ghasemi, A. Hassanzadeh, H. Steki, "The effect of deposition rate on electrical, optical and structural properties of tin-doped indium oxide (ITO) films on glass at low substrate temperature", Physica B: Condensed Mater, 373, 274-279, 2006.
15. 3, and ITO films prepared by thermal oxidation of DC-sputtered Sn, In and In-Sn films", Vacuum, 76, 177-180, 2004.
16. J. B. Choi, J.H. Kim, K.A. Jeon, S. Y. Lee, "Properties of ITO films on glass fabricated by pulsed laser deposition", Materials Science and Engineering, B102, 376-379, 2003.
17. L.R. Cruz, C. Legnani, I.G. Matoso, C.L. Ferreira, H.R. Moutinho, " Influence of pressure and annealing on the microstructural and electro-optical properties of RF magnetron sputtered ITO thin films", Materials Research Bulletin, 39, 993-1003, 2004.
18. D. Troadec, G. Veriot, R. Antony, A. Moliton, "Organic light-emitting diodes based on multilayer structures", Synth. Metals, 124, 49, 2001.
19. H. Lim, W.-J. Cho, C.-S. Ha, S. Ando, Y.-K. Kim, C.-H. Park, K. Lee, "Flexible Organic Electroluminescent Devices Based on Fluorine-Containing Colorless Polyimide Substrates", Adv. Mater., 14, 1275-1279, 2002.
20. F.L. Wong, M.K. Fung, S.W. Tong, C.S. Lee, S.T. Lee, "Flexible organic light-emitting device based on magnetron sputtered indium-tin-oxide on plastic substrate", Thin Solid Films, 466, 225-230, 2004.
21. H.H. Yu, S.-J. Hwang, M.-C. Tseng, C.-C. Tseng, "The effect of ITO films thickness on the properties of flexible organic light emitting diode", Optics Communications, 259, 187-193, 2006.